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Atsuki Fukazawa

ASM International

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Publication

Featured researches published by Atsuki Fukazawa.

Archive | 2009

Method of Forming Conformal Dielectric Film Having Si-N Bonds by PECVD

Woo Jin Lee; Akira Shimizu; Atsuki Fukazawa

Archive | 2008

Device isolation technology on semiconductor substrate

Woo Jin Lee; Atsuki Fukazawa; Nobuo Matsuki

Archive | 2009

Method of Forming Insulation Film Using Plasma Treatment Cycles

Akiko Kobayashi; Akira Shimizu; Kuo-wei Hong; Nobuyoshi Kobayashi; Atsuki Fukazawa

Archive | 2011

Method of Depositing Dielectric Film by ALD Using Precursor Containing Silicon, Hydrocarbon, and Halogen

Atsuki Fukazawa; Noboru Takamure

Archive | 2006

Method for forming insulation film

Atsuki Fukazawa; Nobuo Matsuki; Seijiro Umemoto

Archive | 2014

Methods for forming doped silicon oxide thin films

Noboru Takamure; Atsuki Fukazawa; Hideaki Fukuda; Antti Niskanen; Suvi Haukka; Ryu Nakano; Kunitoshi Namba

Archive | 2010

METHOD FOR FORMING INTERCONNECT STRUCTURE HAVING AIRGAP

Julian J. Hsieh; Nobuyoshi Kobayashi; Akira Shimizu; Kiyohiro Matsushita; Atsuki Fukazawa

Archive | 2003

Method for forming low-k hard film

Yasuyoshi Hyodo; Atsuki Fukazawa; Yoshinori Morisada; Masashi Yamaguchi; Nobuo Matsuki

Archive | 2015

Method for Forming Conformal Nitrided, Oxidized, or Carbonized Dielectric Film by Atomic Layer Deposition

Atsuki Fukazawa

Archive | 2012

Method for Forming Dielectric Film Containing Si-C bonds by Atomic Layer Deposition Using Precursor Containing Si-C-Si bond

Atsuki Fukazawa; Noboru Takamure

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Collaboration

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Nobuo Matsuki

ASM International

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Naoto Tsuji

ASM International

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Hideaki Fukuda

ASM International

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Akira Shimizu

ASM International

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Manabu Kato

ASM International

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Noboru Takamure

ASM International

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Kiyohiro Matsushita

ASM International

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Nobuyoshi Kobayashi

ASM International

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Woo Jin Lee

ASM International

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Yoshinori Morisada

ASM International

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