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Dive into the research topics where Yoshinori Morisada is active.

Publication


Featured researches published by Yoshinori Morisada.


Japanese Journal of Applied Physics | 2005

Fabrication of Nanoparticle Composite Porous Films Having Ultralow Dielectric Constant

Shota Nunomura; Kazunori Koga; Masaharu Shiratani; Yukio Watanabe; Yoshinori Morisada; Nobuo Matsuki; Shingo Ikeda

Nanoparticle composite porous films having a dielectric constant of er=1.7–3.5 have been deposited using plasma chemical vapor deposition. Nanoparticles as nano-building blocks and radicals as adhesives are generated in plasmas, and nanoparticles are deposited together with radicals on substrates to form porous films. Nano-sized pores are dispersed in the films and their dielectric constants are controlled by the concentrations of pores, i.e., their porosities. The method is applicable to depositing nanoparticle composite porous films for other applications.


Archive | 1999

Silicone polymer insulation film on semiconductor substrate and method for forming the film

Nobuo Matsuki; Yuichi Naito; Yoshinori Morisada; Aya Matsunoshita


Archive | 2002

Plasma CVD film-forming device

Nobuo Matsuki; Yoshinori Morisada


Archive | 2001

Siloxan polymer film on semiconductor substrate and method for forming same

Nobuo Matsuki; Lee Jea Sik; Yoshinori Morisada; Satoshi Takahashi


Archive | 2002

Siloxan polymer film on semiconductor substrate

Nobuo Matsuki; Lee Jea Sik; Yoshinori Morisada; Satoshi Takahashi


Archive | 2003

Method for forming low-k hard film

Yasuyoshi Hyodo; Atsuki Fukazawa; Yoshinori Morisada; Masashi Yamaguchi; Nobuo Matsuki


Archive | 2007

Method of self-cleaning of carbon-based film

Yoshinori Morisada; Seiji Okura; Kamal Kishore Goundar; Seongoh Woo; Kiyoshi Satoh


Archive | 2002

Insulation film on semiconductor substrate and method for forming same

Nobuo Matsuki; Yasuyoshi Hyodo; Masashi Yamaguchi; Yoshinori Morisada; Atsuki Fukazawa; Manabu Kato; Shinya Kaneko; Devendra Kumar; Seijiro Umemoto


Archive | 2004

Dual-chamber plasma processing apparatus

Yasuhiro Tobe; Yoshinori Morisada; Shingo Ikeda; Baiei Kawano


Archive | 2005

Shower plate having projections and plasma CVD apparatus using same

Naoto Tsuji; Hideaki Fukuda; Hiroki Arai; Yoshinori Morisada; Tamihiro Kobayashi

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