Atsushi Moriya
Hitachi
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Publication
Featured researches published by Atsushi Moriya.
Meeting Abstracts | 2006
Yasuo Kunii; Yasuhiro Inokuchi; Jie Wang; Katsuhiko Yamamoto; Atsushi Moriya; Yoshiaki Hashiba; Harushige Kurokawa; Junichi Murota
Si/SiGe selective epitaxial growth is becoming a critical process step for ULSI fabrication on 65nm and beyond technologies with need for elevated source-drain or strained silicon channel to enhance device performance. This paper reviews the efforts to improve batch-type epitaxial reactors for high-volume device fabrication and shows recent progress in low-temperature Si/SiGe selective epitaxial process.
Archive | 2014
Atsushi Moriya; Naoharu Nakaiso; Yugo Orihashi; Kotaro Murakami
Archive | 2008
Yasuhiro Inokuchi; Atsushi Moriya
Archive | 2005
Takashi Ozaki; Osamu Kasahara; Takaaki Noda; Kiyohiko Maeda; Atsushi Moriya; Minoru Sakamoto
Archive | 2011
Kiyohisa Ishibashi; Atsushi Moriya; Takaaki Noda; Kiyohiko Maeda
Archive | 2006
Yasuhiro Inokuchi; Atsushi Moriya; Katsuhiko Yamamoto; Yoshiaki Hashiba; Takashi Yokogawa
Archive | 2003
Atsushi Moriya; Yasuhiro Inokuchi; Yasuo Kunii; Junichi Murota
international sige technology and device meeting | 2004
Yasuo Kunii; Yasuhiro Inokuchi; Atsushi Moriya; Harushige Kurokawa; Junichi Murota
Solid-state Electronics | 2015
Kaichiro Minami; Atsushi Moriya; Kazuhiro Yuasa; Kiyohiko Maeda; Masayuki Yamada; Yasuo Kunii; Michio Niwano; Junichi Murota
Archive | 2015
Atsushi Moriya; Naoharu Nakaiso; Yugo Orihashi; Kotaro Murakami
