Is this you? Create Your Porfile
Avatar

Kazuhiro Yuasa

Hitachi

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Kazuhiro Yuasa is active.

Explore More

Publication

Featured researches published by Kazuhiro Yuasa.

Archive | 2009

Producing method of semiconductor device and substrate processing apparatus

Takashi Ozaki; Kazuhiro Yuasa; Kiyohiko Maeda

Archive | 2010

Method for manufacturing semiconductor device, and substrate processing method and substrate processing apparatus

Osamu Kasahara; Keigo Nishida; Ketsu O; Kazuhiro Yuasa; 和宏 湯浅; 修 笠原; 圭吾 西田

Archive | 2010

Manufacturing method of a semiconductor device and substrate processing apparatus

Kazuhiro Yuasa; Yasuhiro Megawa

Archive | 2012

Method of manufacturing semiconductor device, method of processing substrate and non-transitory computer readable recording medium

Kazuhiro Yuasa; Naonori Akae; Masato Terasaki

Archive | 2011

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Kazuhiro Yuasa; Ryuji Yamamoto

Archive | 2013

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

Kazuhiro Yuasa; Naonori Akae

Archive | 2011

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SUBSTRATE PROCESSING METHOD AND APPARATUS

Jie Wang; Osamu Kasahara; Kazuhiro Yuasa; Keigo Nishida

Archive | 2010

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SEMICONDUCTOR DEVICE

Tatsuyuki Saito; Kazuhiro Yuasa; Yoshiro Hirose; Yuji Takebayashi; Ryota Sasajima; Katsuhiko Yamamoto; Hirohisa Yamazaki; Shintaro Kogura; Hirotaka Hamamura

Archive | 2006

Semiconductor device manufacturing method and substrate treatment device

Kazuhiro Yuasa; Yasuhiro Megawa

Archive | 2011

Method for producing semiconductor device, method for substrate treatment, and device for substrate treatment

Kazuhiro Yuasa; 和宏 湯浅; Ryuji Yamamoto; 山本 隆治

Explore More

Collaboration

Dive into the Kazuhiro Yuasa's collaboration.

Top Co-Authors
Avatar

Yasuhiro Megawa

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Kiyohiko Maeda

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Atsushi Moriya

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Kazuhiro Kimura

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Masanori Sakai

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Kaichiro Minami

Tohoku University

View shared research outputs
Top Co-Authors
Avatar

Keigo Nishida

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Masayuki Yamada

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Mitsuro Tanabe

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Naonori Akae

Hitachi

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge