Atsushi Uemoto

3D Atom Probe Microscopy Sample Preparation by Using L-Shape FIB-SEM-Ar Triple Beam

3D atom probe microscopy (3DAPM) is used as the technique of analyzing the three-dimensional information including chemical composition and atomic structure with near atomic-scale resolution [1]. The near atomic-scale resolution is realized by extracting atoms on a sample surface one by one with electric field evaporation. The needle-like sample with a tip diameter of about 50 nm is required in order to apply the local high electric field to the sample surface.