Tatsuya Asahata

A nanofactory by focused ion beam

A focused ion beam (FIB) system is process equipment used to make a wide variety of small structures of various materials by irradiating a focused gallium ion beam of nanometer-order diameter to a surface of specimens and by utilizing spattering etching and ion beam induced deposition. In order to realize greater diversity of structures with use of the FIB system, we developed a technology of making three-dimensional structures by using gas assist etching, and a precision wheel stage to be used in the focused ion beam (FIB) system. Using these technologies with the FIB system, we achieved a nano processing machine which can be called a nano milling machine or a nano lathe.

3D Atom Probe Microscopy Sample Preparation by Using L-Shape FIB-SEM-Ar Triple Beam

3D atom probe microscopy (3DAPM) is used as the technique of analyzing the three-dimensional information including chemical composition and atomic structure with near atomic-scale resolution [1]. The near atomic-scale resolution is realized by extracting atoms on a sample surface one by one with electric field evaporation. The needle-like sample with a tip diameter of about 50 nm is required in order to apply the local high electric field to the sample surface.

3D Structure Fabrication by FIB Milling and Deposition

Focused Ion Beam (FIB) system is equipment used to make a wide variety of micro and Nano structures. Structures can be created using various materials by irradiating focused gallium ion beam on to the surface of specimens and by sputtering, etching and ion beam induced deposition. In order to realize greater diversity for nano construction by using the FIB system, we have developed technologies incorporating: - Built-in pattern signal generator - Multiple Gas Unit for gas assisted etching and beam induced deposition - A precision wheel for the stage. This latest FIB system has a narrow Ion beam with a diameter of better than 4nm. Beam current is controlled from 0.15pA to 20nA. These performances contribute significantly to the study 3D structures fabrication and modification.