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Featured researches published by B. Vratzov.


Optics Express | 2015

Fabrication and characterization of free-standing, high-line-density transmission gratings for the vacuum UV to soft X-ray range

S.J. Goh; Hubertus M.J. Bastiaens; B. Vratzov; Qiushi Huang; Frederik Bijkerk; Klaus J. Boller

We present state-of-the-art high resolution transmission gratings, applicable for spectroscopy in the vacuum ultraviolet (VUV) and the soft X-ray (SRX) wavelength range, fabricated with a novel process using ultraviolet based nano imprint lithography (UV-NIL). Free-standing, high-line-density gratings with up to 10,000 lines per mm and various space-to-period ratios were fabricated. An optical characterization of the gratings was carried out in the range from 17 to 34 nm wavelength using high-harmonic generation in a capillary waveguide filled with Ne, and around 13.5 nm wavelength (from 10 to 17 nm) using a Xenon discharge plasma.


Archive | 2017

Broadband spectrometer development based on high-density free-standing transmission gratings

Muharrem Bayraktar; Fei Liu; Hubertus M.J. Bastiaens; Caspar Bruineman; B. Vratzov; Frederik Bijkerk


NEVAC blad | 2016

Broadband transmission grating spectrometer for measuring the emission spectrum of EUV sources

Muharrem Bayraktar; Hubertus M.J. Bastiaens; Caspar Bruineman; B. Vratzov; Frederik Bijkerk


2016 International Workshop on EUV and Soft X-Ray Sources | 2016

Transmission grating spectrometer for broadband characterization of EUV sources

Muharrem Bayraktar; Hubertus M.J. Bastiaens; Caspar Bruineman; B. Vratzov; Frederik Bijkerk


Archive | 2015

A wide band transmission mode spectrometer for diagnosis of EUV sources

J.L.P. Barreaux; Muharrem Bayraktar; Hubertus M.J. Bastiaens; Caspar Bruineman; B. Vratzov; Frederik Bijkerk


Archive | 2013

Transmission grating spectroscopy in the EUV and VUV

Hubertus M.J. Bastiaens; Caspar Bruineman; B. Vratzov; Eric Louis; Frederik Bijkerk


Archive | 2012

High line density free-standing transmission gratings for EUV emission spectroscopy

Hubertus M.J. Bastiaens; R. van der Meer; B. Vratzov; Frederik Bijkerk


24th NNV-Symposium Plasma Physics & Radiation Technology 2012 | 2012

Reduced bandwidths for soft-x ray reflection using Lamellar Multilayer Gratings

R. van der Meer; B. Krishnan; Igor V. Kozhevnikov; Meint J. de Boer; B. Vratzov; Hubertus M.J. Bastiaens; Jurriaan Huskens; W. G. van der Wiel; Petronella Emerentiana Hegeman; G. C. S. Brons; Klaus J. Boller; Frederik Bijkerk


23rd NVV-Symposium Plasma Physics & Radiation Technology 2011 | 2011

Improved resolution for soft-x-ray monochromatization using lamellar multilayer amplitude gratings

R. van der Meer; B. Krishnan; Igor V. Kozhevnikov; Meint J. de Boer; B. Vratzov; Hubertus M.J. Bastiaens; Jurriaan Huskens; Wilfred Gerard van der Wiel; Klaus J. Boller; Frederik Bijkerk


Netherlands MicroNanoConference 2010 | 2010

Fabrication of lamellar multilayer gratings using UV-NIL and modified Bosch etching

R. van der Meer; B. Krishnan; Igor V. Kozhevnikov; B. Vratzov; Hubertus M.J. Bastiaens; Jurriaan Huskens; Wilfred Gerard van der Wiel; Klaus J. Boller; Frederik Bijkerk

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Frederik Bijkerk

Russian Academy of Sciences

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Frederik Bijkerk

Russian Academy of Sciences

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Klaus J. Boller

MESA+ Institute for Nanotechnology

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Jurriaan Huskens

MESA+ Institute for Nanotechnology

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Muharrem Bayraktar

MESA+ Institute for Nanotechnology

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