Hubertus M.J. Bastiaens

High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime

High resolution while maintaining high peak reflectivities can be achieved for Lamellar Multilayer Amplitude Gratings (LMAG) in the soft-x-ray (SXR) region. Using the coupled waves approach (CWA), it is derived that for small lamellar widths only the zeroth diffraction order needs to be considered for LMAG performance calculations, referred to as the single-order regime. In this regime, LMAG performance can be calculated by assuming a conventional multilayer mirror with decreased density, which significantly simplifies the calculations. Novel analytic criteria for the design of LMAGs are derived from the CWA and it is shown, for the first time, that the resolution of an LMAG operating in the single-order regime is not limited by absorption as in conventional multilayer mirrors. It is also shown that the peak reflectivity of an LMAG can then still be as high as that of a conventional multilayer mirror (MM). The performance of LMAGs operating in the single-order regime are thus only limited by technological factors.

Analytic theory of soft x-ray diffraction by lamellar multilayer gratings

An analytic theory describing soft x-ray diffraction by Lamellar Multilayer Gratings (LMG) has been developed. The theory is derived from a coupled waves approach for LMGs operating in the single-order regime, where an incident plane wave can only excite a single diffraction order. The results from calculations based on these very simple analytic expressions are demonstrated to be in excellent agreement with those obtained using the rigorous coupled-waves approach. The conditions for maximum reflectivity and diffraction efficiency are deduced and discussed. A brief investigation into p-polarized radiation diffraction is also performed.

Current filamentation in discharge-excited F2-based excimer laser gas mixtures

Discharge instabilities in x-ray preionized F2-doped excimer laser gas mixtures are investigated using an intensified charge coupled device camera with a gating time of 300 ps. In contradiction with earlier theories and observations, it is found that the discharges in He/F2 mixtures are homogeneous only at very low concentration of F2 0.025%. We present experimental results, which prove that in He/Kr/F2 mixtures the appearance of discharge filaments is coupled with the presence of F2 rather than Kr.

Effect of preionization, fluorine concentration, and current density on the discharge uniformity in F2 excimer laser gas mixtures

The discharge homogeneity in F2-based excimer laser gas mixtures and its dependence on various key parameters, such as the degree of preionization, preionization delay time, F2 concentration and current density, is investigated in a small x-ray preionized discharge chamber. The spatial and temporal evolution of the discharges is monitored by taking photographs of the discharge fluorescence with a fast intensified CCD camera. It is found that a preionization electron density of about 107 cm−3 bar−1 is sufficient to initiate a streamer-free homogeneous discharge in gas mixtures of helium and fluorine with multiatmospheric gas pressure. The accompanying optimum time delay between the application of the x-ray pulse and voltage across the discharge electrodes is determined to be about 20 ns. It is shown that in spite of these optimum initial conditions, a homogeneous glow discharge eventually transforms into an inhomogeneous discharge containing numerous filaments. Our experiments show that the higher the initial F2 concentration, the initial current density or the pump power density, the shorter the time interval over which the discharge stays homogeneous. By a quantitative characterization and defining a detailed measure of the observed discharge inhomogeneity we find that halogen depletion, as suggested from the theory, is responsible for the temporal instability of discharges in such laser gas mixtures, as the experimental results are in good agreement with the theory on the halogen depletion instability mechanism

Design and simulation of laser wakefield acceleration with external electron bunch injection in front of the laser pulse

In this article we present a theoretical investigation on an experimental design of a laser wakefield accelerator in which electron bunches from a photocathode radio frequency linac are injected into a capillary discharge plasma channel just in front of a few tens of terawatt drive laser pulse. The electron bunch, with a kinetic energy of 2.9 MeV and an energy chirp imposed by the linac, is magnetically compressed by a factor of 8 to a duration of 250 fs, and is magnetically focused into the plasma channel where it matches the spot size of the drive laser ([approximate]30 µm). The dynamics of the bunch, starting from the photocathode, through the linac, along the beam transportation line, through the magnetic compressor, and its focusing into the plasma channel are comprehensively simulated with the general particle tracer code. Further, we use our three-dimensional numerical codes to calculate the laser wakefield and to determine and optimize the trapping and acceleration of the injected bunch in the wakefield. We show that, injecting a 5 pC electron bunch of 250 fs duration, the experiment should deliver an electron bunch of approximately 744 MeV energy, with 1.1% relative energy spread, and with an extremely short duration (6 fs), after acceleration in a 5.4 cm long plasma channel

Long pulse electron beam pumped molecular F2* laser

An electron beam pumped molecular F*2 laser with optical pulse widths up to 160 ns, and an output energy of 1.7 J (optical flux of 4.6 MW/cm2) has been realized. The widths of the laser pulses seem only limited by the duration of the excitation pulse (160 ns). For specific output powers up to 100 kW/cm3 no signs of self‐terminating laser pulses due to bottlenecking in the lower laser level have been observed.

Fabrication and characterization of free-standing, high-line-density transmission gratings for the vacuum UV to soft X-ray range

We present state-of-the-art high resolution transmission gratings, applicable for spectroscopy in the vacuum ultraviolet (VUV) and the soft X-ray (SRX) wavelength range, fabricated with a novel process using ultraviolet based nano imprint lithography (UV-NIL). Free-standing, high-line-density gratings with up to 10,000 lines per mm and various space-to-period ratios were fabricated. An optical characterization of the gratings was carried out in the range from 17 to 34 nm wavelength using high-harmonic generation in a capillary waveguide filled with Ne, and around 13.5 nm wavelength (from 10 to 17 nm) using a Xenon discharge plasma.

Extended theory of soft x-ray reflection for realistic lamellar multilayer gratings

An extended set of coupled wave equations were derived to describe non-idealized lamellar multilayer grating structures with properties as obtained with state-of-the-art fabrication techniques. These generalized equations can include all relevant effects describing the influence of passivation and contamination layers, non-rectangular lamel profiles and sidewall scalloping. The calculations showed that passivation and contamination plays an important role in that it may significantly reduce peak reflectivity. However, we also derived a condition for layer thicknesses having negligible effects. Slightly positive tapered lamel profiles are shown to further reduce the bandwidth as compared to a rectangular lamel profile, whereas negative tapers significantly increased the bandwidth. The influence of intriguing effects, such as the sidewall scalloping caused by Bosch Deep Reactive Ion Etching, are also modeled. We identified the signature of such scalloping as additional side peaks in the reflectivity spectrum and present parameters with which these can be effectively suppressed.

Compact coaxially excited high energy density KrF laser

A coaxial electron beam generator is described operating without a pulse‐shortening line. It delivers pumping pulses with a length ranging from 150 up to 500 ns (FWHM). For a laser volume of 0.6 l, a pulse duration of 250 ns and a current density of about 50 A/cm2, a maximum output of 13 J is obtained. The present experiments show that this relatively high current regime is also applicable to long pulses.

Narrowband and tunable anomalous transmission filters for special monitoring in the extreme ultraviolet wavelength region

We present the first experimental demonstration of a novel type of narrowband and wavelength-tunable multilayer transmission filter for the extreme ultraviolet (EUV) region. The operating principle of the filter is based on spatially overlapping the nodes of a standing wave field with the absorbing layers within the multilayer structure. For a wavelength with a matching node pattern, this increases the transmission as compared to neighboring wavelengths where anti-nodes overlap with the absorbing layers. Using Ni/Si multilayers where Ni provides strong absorption, we demonstrate the proper working of such anomalous transmission filter. The demonstration is carried out at the example of 13.5 nm wavelength and at normal incidence, providing a 0.27 nm-wide transmission peak. We also demonstrate wavelength tunability by operating the same Ni/Si filter at different wavelengths by varying the angle of incidence. As the multilayer filter is directly deposited on the active area of an EUV-sensitive photodiode, this provides an extremely compact device for easy spectral monitoring in the EUV. The transmission spectrum of the filter is modeled and found to be in good agreement with the experimental data. The agreement proves that such filters and compact monitoring devices can be straightforwardly designed and fabricated, as desired, also for other EUV wavelengths, bandwidths and angles of incidence, thereby showing a high potential for applications.