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Baik-soon Choi

Samsung

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Publication

Featured researches published by Baik-soon Choi.

Archive | 2001

Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk

Sung-Bum Cho; Baik-soon Choi; Jin-Sung Kim; Kyue-sang Choi

Archive | 1998

Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning method

Sung-Bum Cho; Hak-pil Yongin Kim; Eun-hee Shin; Baik-soon Choi

Archive | 1998

Chemical vapor deposition apparatus for manufacturing semiconductor devices

Baik-soon Choi; Jung-il An; Jin-Sung Kim; Jung-ki Kim

Archive | 2005

Method of manufacturing a semiconductor device using a cleaning composition

Kyung-Jin Lee; Seung-Hyun Ahn; Baik-soon Choi; Kui-Jong Baek; Woong Hahn

Archive | 2003

Thinner composition and method of stripping a photoresist using the same

Seung-Hyun Ahn; Sang-mun Chon; Hoe-sik Chung; Mi-sook Jeon; Eun-Mi Bae; Baik-soon Choi; Ok-Seok Jang; Young-Cheul Lim

Archive | 2001

Inductive-coupled plasma apparatus employing shield and method for manufacturing the shield

Eun-hee Shin; Jin-Man Kim; Baik-soon Choi; Hun Cha

Archive | 2000

Chemical vapor deposition apparatus for manufacturing semiconductor devices, its driving method, and method of optimizing recipe of cleaning process for process chamber

Baik-soon Choi; Jung-il An; Jin-Sung Kim; Jung-ki Kim

Archive | 2000

Method for sampling particles present in a processing chamber

Hee-jung Park; Baik-soon Choi; Jin-Sung Kim; Sung-Chul Kang

Archive | 1999

Metallization process for manufacturing semiconductor devices

Baik-soon Choi; Jae-saeng Lee; Eun-hee Shin; Sung-Bum Cho

Archive | 1998

Apparatus and method for particle sampling during semiconductor device manufacturing

Hee-jung Park; Baik-soon Choi; Jin-Sung Kim; Sung-Chul Kang

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Sung-Bum Cho

Samsung

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Eun-hee Shin

Samsung

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Jin-Sung Kim

Samsung

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Hak-pil Yongin Kim

Samsung

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Seung-Hyun Ahn

Samsung

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Jung-il An

Samsung

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Jung-ki Kim

Samsung

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Kyue-sang Choi

Samsung

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Dong-Min Kang

Samsung

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Hee-jung Park

Samsung

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