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Eun-hee Shin

Samsung

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Publication

Featured researches published by Eun-hee Shin.

Archive | 1998

Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning method

Sung-Bum Cho; Hak-pil Yongin Kim; Eun-hee Shin; Baik-soon Choi

Archive | 2001

Inductive-coupled plasma apparatus employing shield and method for manufacturing the shield

Eun-hee Shin; Jin-Man Kim; Baik-soon Choi; Hun Cha

Archive | 1999

Metallization process for manufacturing semiconductor devices

Baik-soon Choi; Jae-saeng Lee; Eun-hee Shin; Sung-Bum Cho

Archive | 1999

Dry etching apparatus for manufacturing semiconductor devices

Eun-hee Shin; Sung-Bum Cho; Baik-soon Choi; Young-Koo Lee

Archive | 2001

Metallization process for manufacturing semiconductor devices and system used in same

Baik-soon Choi; Jae-saeng Lee; Eun-hee Shin; Sung-Bum Cho

Archive | 1999

Formation of metal wiring of semiconductor element and system thereof

Sung-Bum Cho; Baik-soon Choi; Zaisei Ri; Eun-hee Shin; 百洵 崔; 在生 李; 聖範 趙; 銀姫 辛

Archive | 2001

Method for manufacturing a shield for an inductively-couple plasma apparatus

Eun-hee Shin; Jin-Man Kim; Baik-soon Choi; Hun Cha

Archive | 1998

Device for plasma processing with in-situ monitoring and in-situ monitoring method for such a device

Sung-Bum Cho; Baik-soon Choi; Hak-pil Yongin Kim; Eun-hee Shin

Archive | 1998

In-situ monitoring plasma etching apparatus, in-situ monitoring process for this device and in-situ removal of residues from Reinigugnsverfahren to a plasma etching chamber

Sung-Bum Cho; Hak-pil Yongin Kim; Eun-hee Shin; Baik-soon Choi

Archive | 1998

In-Situ-Überwachungs-Plasmaätzvorrichtung, In-Situ-Überwachungsverfahren für diese Vorrichtung und In-Situ-Reinigugnsverfahren zur Entfernung von Rückständen aus einer Plasmaätzkammer In-situ monitoring plasma etching apparatus, in-situ monitoring apparatus and method for this in-situ Reinigugnsverfahren for removing plasma etch residues from a

Sung-Bum Cho; Hak-pil Yongin Kim; Eun-hee Shin; Baik-soon Choi

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Baik-soon Choi

Samsung

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Sung-Bum Cho

Samsung

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Hak-pil Yongin Kim

Samsung

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Hun Cha

Samsung

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Jae-saeng Lee

Samsung

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Jin-Man Kim

Samsung

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Young-Koo Lee

Samsung

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