Baumann Helmut Dr | Researchain

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Archive | 1991

VERFAHREN ZUM AUFBAU VON MIKROMECHANISCHEN BAUELEMENTEN IN DICKSCHICHTTECHNIK

Roethlingshoefer Walter Dipl I; Muenzel Horst Dipl Phys Dr; Baumann Helmut Dr

Archive | 2001

MICROMECHANICAL CAP STRUCTURE AND ITS MANUFACTURING METHOD

Pinter Stefan Dr; Emmerich Harald; Trah Hans-Peter; Baumann Helmut Dr

Archive | 1998

MANUFACTURE OF SENSOR AND WAFER STAPLE

Kurle Juergen; Weiblen Kurt; Pinter Stefan Dr; Muenzel Horst Dipl Phys Dr; Baumann Helmut Dr; Schubert Dietrich Dr; Bender Karl; Lutz Markus

Archive | 1992

MONTAGEVERFAHREN FUER MIKROMECHANISCHE SENSOREN

Marek Jiri Dr Ing; Weiblen Kurt Ing Grad; Willmann Martin Dr Ing; Jaeckel Klaus Dipl Ing; Bantien Frank Dipl Phys Dr; Baumann Helmut Dr; Becker Rolf Dr Ing

Archive | 2001

MICROMACHINING-TYPE CONSTITUENT ELEMENT

Pinter Stefan Dr; Schoefthaler Martin; Illing Matthias; Schellin Ralf; Baumann Helmut Dr; Fehrenbach Michael; Schubert Dietrich; Bischopink Georg

Archive | 2000

METHOD TO ENCAPSULATE METALLIC MICRO-COMPONENT ELEMENT

Pinter Stefan Dr; Josef Hirtleiter; Baumann Helmut Dr; Fehrenbach Michael; Laermer Franz; Elsner Bernhard

Archive | 1991

Etching of pattern in or through glass layers - uses thin nickel layer directly on glass and photoresist on top of this to provide improved adhesion and etch resistance

Goebel Herbert Dipl Phys Dr; Riedinger Franz; Muenzel Horst Dipl Phys Dr; Baumann Helmut Dr

Archive | 2012

MICROMECHANICAL CAP STRUCTURE

Pinter Stefan Dr; Emmerich Harald; Trah Hans-Peter; Baumann Helmut Dr

Archive | 2000

DEVICE FOR GENERATING ELECTRICAL PULSATION IN GHz REGION

Leiter Manfred; Weiblen Kurt; Lucas Bernhard; Schatz Frank; Beez Thomas; Seiz Juergen; Baumann Helmut Dr; Olbrich Herbert; Eisenschmid Heinz; Eberhard Mess; Dutzi Joachim; Kugler Andreas

Archive | 2000

CASING FOR ELECTRONIC STRUCTURE ELEMENT

Leiter Manfred; Weiblen Kurt; Lucas Bernhard; Schatz Frank; Beez Thomas; Seiz Juergen; Baumann Helmut Dr; Olbrich Herbert; Eisenschmid Heinz; Moess Eberhard; Dutzi Joachim; Kugler Andreas

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