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Emmerich Harald

Bosch

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Publication

Featured researches published by Emmerich Harald.

Archive | 1999

Producing a microstructure for chemical sensors etc.

Artmann Hans; Emmerich Harald

Archive | 2001

MICROMECHANICAL CAP STRUCTURE AND ITS MANUFACTURING METHOD

Pinter Stefan Dr; Emmerich Harald; Trah Hans-Peter; Baumann Helmut Dr

Archive | 2001

Micromechanical cap structure comprises substrate in the form of wafer with a cavern having a base surface and parallel side wall sections lying opposite each other with stabilizing wall sections connected to the side wall sections

Pinter Stefan; Emmerich Harald; Trah Hans-Peter; Baumann Helmut

Archive | 2000

Micromachine-type rotation angle accelerometer

Schoefthaler Martin; Emmerich Harald

Archive | 2001

Sensor, insbesondere mikromechanischer Sensor, und Verfahren zu dessen Herstellung

Walter Marc; Pinter Stefan; Emmerich Harald; Baumann Helmut

Archive | 2000

MICROMACHING MAGNETIC FIELD SENSOR AND ITS MANUFACTURE

Schoefthaler Martin; Schellin Ralf; Emmerich Harald; Kaienburg Joerg

Archive | 2012

MICROMECHANICAL CAP STRUCTURE

Pinter Stefan Dr; Emmerich Harald; Trah Hans-Peter; Baumann Helmut Dr

Archive | 2008

Verfahren zur Herstellung eines Bauelementes

Vossenberg Heinz-Georg; Emmerich Harald

Archive | 2008

Mikromechanischer Sensor und Verfahren zur hermetischen Verkapselung

Walter Marc; Pinter Stefan; Emmerich Harald; Baumann Helmut

Archive | 1999

Component with micromechanical surface structures, e.g. sensor elements or micro-motor actuators, is produced

Vossenberg Heinz-Georg; Emmerich Harald

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Collaboration

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Baumann Helmut

Bosch

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Pinter Stefan

Bosch

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Trah Hans-Peter

Bosch

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Baumann Helmut Dr

Bosch

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Schoefthaler Martin

Bosch

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Vossenberg Heinz-Georg

Bosch

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Walter Marc

Bosch

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Artmann Hans

Bosch

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Kaienburg Joerg

Bosch

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Schellin Ralf

Bosch

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