Bc Breton

Remote instrument diagnosis on the Internet

First AID (Automated Instrument Diagnostics) is a fault-diagnosis expert system that is based on an information client architecture. This expert system uses generic tools such as Web browsers to aid service engineers in remotely diagnosing the faults in LEO scanning electron microscopes (SEMs). The system lets engineers acquire information directly from the SEM, diagnose inaccurate behavior and remedy inappropriate instrument settings.

Ultra high speed electron beam testing system

Abstract The requirements for high speed electron beam measurement of fast electrical transitions on devices and the limitations to temporal resolution achievable by electron beam test systems are examined in this paper. In the light of this, a novel beam pulsing strategy is presented which permits pulse widths of less than 15ps at sampling rates of up to 50GHz to be attained. Fundamental temporal resolution limitations due to the transit time effect are discussed and measurements of secondary electron energy dispersion are compared with computer models to substantiate this phenomenon in ultra high speed waveform measurements.

A Contactless 3-D Measuring Technique For IC Inspection

Digital filtering techniques have been combined with a scanning electron microscope to provide noise free, TV rate stereo images over the full magnification range of the SEM, giving a qualitative pseudo 3-D representation of the sample surface. In this paper, a development of this technique will be described which permits quantitative measurement of a surface in 3 dimensions. Image correlation techniques have been derived which, when coupled with the lens controls of the SEM in the form of a feedback loop, permit automatic profiling of small structures. The technique has potential applications to a range of integrated circuit inspection techniques including resist profiling and critical dimension measurements.

A dynamic real-time 3-D measurement technique for IC inspection

Abstract Stereoscopic imaging in the SEM enhances the ability to resolve topographical ambiguities encountered during IC process inspection. The limitations of previous implementations are examined and have been addressed during the development of a stereo system. Results are also presented for in situ height measurements within the instrument.

The Application of GPGPU to Automatic Electron Gun Alignment in the Scanning Electron Microscope

Once trained, the human brain is an excellent image processor; to replicate that skill for scanning electron microscope (SEM) image assessment demands considerable computing power. We have evaluated parallel computing for this purpose and developed an image processing tool for the automatic optimisation of electron gun alignment. The instrumental setup for this work was a Carl Zeiss 1430VP SEM with tungsten thermal-emission firing unit.

Gesture-Based Control of the Scanning Electron Microscope Using a Low-Cost Webcam Sensor

This work forms part of our ongoing research into enhancing and improving microscopy and image processing technologies, and was one of a number projects undertaken to explore the potential of gesture-based interface control. This project focused on gesture-based control of a scanning electron microscope (SEM), Carl Zeiss model 1430VP, using a low-cost webcam as the sensor to detect and identify gestures.

Gesture-Based Control of ImageJ Using Leap Sensors

This work forms part of our ongoing research into enhancing and improving microscopy and image processing technologies, and was one of two projects initiated to explore the potential of gesture-based interface control. This project focused on gesture-based manipulation of the ImageJ package, whose functionality can be extended through macros and plugins. In this case, additional plugins were developed to demonstrate the feasibility of interfacing ImageJ with a Leap Motion device.

Gesture-Based Control of Scanning Electron Microscopes Using Leap Sensors

This work forms part of our ongoing research into enhancing and improving SEM technologies, and was one of two projects initiated to explore the potential of gesture-based interface control. This project focused on gesture-based manipulation of the SEM.

Virtual SEM (VSEM)—Ongoing Development of Teaching Resources

In the last decade, microscopy has been successfully employed by a number of research groups as a means of instilling enthusiasm for science and technology into students of all ages, especially school children . Remote microscopy (or telemicroscopy) and virtual microscopy (in the form of software simulators) continue to play important roles in these efforts and also in the teaching and training of new microscopists . Such work and associated electronic teaching resources have become prominent features of conferences such as Microscopy & Microanalysis.

Virtual SEM (VSEM) — Ongoing Development of Teaching Resources

In the last decade, microscopy has been successfully employed by a number of research groups as a means of instilling enthusiasm for science and technology into students of all ages, but particularly school children, e.g. [1]. Remote microscopy (or telemicroscopy) and virtual microscopy (in the form of software simulators) continue to play important roles in these efforts, and also in the teaching and training of new microscopists, e.g. [2 4]. The Microscopy & Microanalysis conference series have become a showcase for such work and associated electronic teaching resources through the regular contributed sessions, e.g. [5].