Benjamin Zain Hanson
Corning Inc.
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Publication
Featured researches published by Benjamin Zain Hanson.
SPIE's 27th Annual International Symposium on Microlithography | 2002
Kenneth Edward Hrdina; Benjamin Zain Hanson; Philip M. Fenn; Robert Sabia
The EUVL industry has unique material requirements, which are being addressed. Implementation of metrology methods new to ULE Glass will be discussed along with material characteristics altered to meet the needs of EUVL. Metrology methods include multiple means of evaluating the striae, CTE and inclusions. Material characteristics have been altered to better meet the demands of the industry. The reduction in inclusion levels along with other improvements such as in the area of striae will be discussed here. Improvements of greater than 4x were achieved in these preliminary striae reduction trials.
Archive | 2010
Matthew John Dejneka; Adam James Ellison; Benjamin Zain Hanson
Journal of the American Ceramic Society | 2004
Matthew John Dejneka; Benjamin Zain Hanson; Steve G. Crigler; Luis A. Zenteno; John D. Minelly; Douglas C. Allan; William James Miller; Dmitri Vladislavovich Kuksenkov
Archive | 2009
Bruce Gardiner Aitken; Chong Pyung An; Benjamin Zain Hanson; Mark Alejandro Quesada
Archive | 2011
Matthew John Dejneka; Benjamin Zain Hanson; Thomas Dale Ketcham
Archive | 2004
Benjamin Zain Hanson; Michael T. Murtagh; Pushkar Tandon
Archive | 2004
Benjamin Zain Hanson; Michael T. Murtagh; Pushkar Tandon
Archive | 2014
Adam James Ellison; Benjamin Zain Hanson; Rostislav V. Roussev
Archive | 2016
Matthew John Dejneka; Benjamin Zain Hanson; Thomas Dale Ketcham; James R. Rustad; Susan Lee Schiefelbein; Kochuparambil Deenamma Vargheese
Archive | 2015
William Peter Addiego; Michael John Bennett; Michael Patrick Carson; Jeffrey Scott Davis; Martin Herbert Goller; Benjamin Zain Hanson; Tracey Lynn Timmons
