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Bernard G. Lindsay

Varian Semiconductor

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Publication

Featured researches published by Bernard G. Lindsay.

Archive | 2011

Techniques for plasma processing a substrate

George D. Papasouliotis; Kamal Hadidi; Helen L. Maynard; Ludovic Godet; Vikram Singh; Timothy J. Miller; Bernard G. Lindsay

Archive | 2009

Closed loop control and process optimization in plasma doping processes using a time of flight ion detector

Deven Raj; Ludovic Godet; Bernard G. Lindsay; Timothy J. Miller; George D. Papasouliotis

Archive | 2007

PLASMA DOPING WITH ENHANCED CHARGE NEUTRALIZATION

Vikram Singh; Timothy J. Miller; Bernard G. Lindsay

Archive | 2008

Plasma processing with enhanced charge neutralization and process control

Vikram Singh; Timothy J. Miller; Bernard G. Lindsay

Archive | 2008

Apparatus for Plasma Processing a Substrate and a Method Thereof

Vikram Singh; Timothy J. Miller; Bernard G. Lindsay

Archive | 2008

Plasma ion process uniformity monitor

Joseph P. Dzengeleski; George M. Gammel; Bernard G. Lindsay; Vikram Singh

Archive | 2009

Technique for monitoring and controlling a plasma process with an ion mobility spectrometer

Kamal Hadidi; Bernard G. Lindsay

Archive | 2007

Techniques for detecting wafer charging in a plasma processing system

Steven R. Walther; Bon-Woong Koo; Bernard G. Lindsay

Archive | 2009

System and method for selectively controlling ion composition of ion sources

Kamal Hadidi; Rajesh Dorai; Bernard G. Lindsay; Vikram Singh; George D. Papasouliotis

Archive | 2010

System and method for selectively controlling ion composition of plasmas

Kamal Hadidi; Rajesh Dorai; Bernard G. Lindsay; Vikram Singh; George D. Papasouliotis

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Collaboration

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Vikram Singh

Varian Semiconductor

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Kamal Hadidi

Varian Semiconductor

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Timothy J. Miller

Varian Semiconductor

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George D. Papasouliotis

Varian Semiconductor

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Ludovic Godet

Varian Semiconductor

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Bon-Woong Koo

Varian Semiconductor

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Rajesh Dorai

Varian Semiconductor

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Deven Raj

Varian Semiconductor

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George M. Gammel

Varian Semiconductor

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Helen L. Maynard

Varian Semiconductor

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