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Rajesh Dorai

Varian Semiconductor

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Publication

Featured researches published by Rajesh Dorai.

Archive | 2005

Tilted Plasma Doping

Vikram Singh; James Buff; Rajesh Dorai

Archive | 2005

Faraday dose and uniformity monitor for plasma based ion implantation

Steven R. Walther; Rajesh Dorai; Harold Persing; Jay T. Scheuer; Bon-Woong Koo; Bjorn O. Pedersen; Chris Leavitt; Timothy J. Miller

Archive | 2008

Particle beam assisted modification of thin film materials

Jonathan Gerald England; Frank Sinclair; John Koo; Rajesh Dorai; Ludovic Godet

Archive | 2008

Method and apparatus for controlling beam current uniformity in an ion implanter

Rajesh Dorai; Peter F. Kurunczi; Alexander S. Perel; Wilhelm P. Platow

Archive | 2008

Particle beam assisted modifcation of thin film materials

Jonathan Gerald England; Frank Sinclair; John Bon Wong Koo; Rajesh Dorai; Ludovic Godet

Archive | 2006

TECHNIQUES FOR CONFINING ELECTRONS IN AN ION IMPLANTER

Donna L. Smatlak; Gordon Angel; Rajesh Dorai

Archive | 2011

TRANSFORMER-COUPLED RF SOURCE FOR PLASMA PROCESSING TOOL

Kamal Hadidi; Rajesh Dorai

Archive | 2009

System and method for selectively controlling ion composition of ion sources

Kamal Hadidi; Rajesh Dorai; Bernard G. Lindsay; Vikram Singh; George D. Papasouliotis

Archive | 2010

System and method for selectively controlling ion composition of plasmas

Kamal Hadidi; Rajesh Dorai; Bernard G. Lindsay; Vikram Singh; George D. Papasouliotis

Physica Status Solidi (c) | 2008

Advanced optimization and process control of plasma doping apparatus

Timothy J. Miller; Rajesh Dorai; Ludovic Godet; George D. Papasouliotis; Vikram Singh

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Collaboration

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Frank Sinclair

Varian Semiconductor

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Ludovic Godet

Varian Semiconductor

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Vikram Singh

Varian Semiconductor

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Kamal Hadidi

Varian Semiconductor

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George D. Papasouliotis

Varian Semiconductor

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Jonathan Gerald England

Varian Semiconductor

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Alexander C. Kontos

Varian Semiconductor

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Alexander S. Perel

Varian Semiconductor

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Bernard G. Lindsay

Varian Semiconductor

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Timothy J. Miller

Varian Semiconductor

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