Billy W. Ward
Carl Zeiss AG
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Publication
Featured researches published by Billy W. Ward.
Journal of Vacuum Science & Technology B | 2006
Billy W. Ward; John Notte; Nicholas P. Economou
ALIS Corporation has developed a new helium ion microscope which has many advantages over both traditional scanning electron microscopes (SEMs) and focused ion beams (FIBs). This new technology is expected to produce an ultimate focused spot size of 0.25nm. This high resolution is attributed to the high source brightness (B>4×109A∕cm2sr), low energy spread (ΔE∕E∼2×10−5), and small diffraction effects (λ∼80fm). The interaction of helium ions with matter offers several valuable contrast mechanisms and a surface interaction volume which is much smaller than a SEM or conventional FIB.
Archive | 2006
Billy W. Ward; John Notte; Louis S. Farkas; Randall G. Percival; Raymond Hill
Archive | 2006
Billy W. Ward; Louis S. Farkas; John Notte; Randall G. Percival
Archive | 2008
Billy W. Ward; Louis S. Farkas; John Notte; Randall G. Percival
Archive | 1990
Billy W. Ward; Randall G. Percival
Archive | 2009
John Notte; Lawrence Scipioni; Billy W. Ward; William Thompson
Archive | 2010
Billy W. Ward; John Notte; Randall G. Percival
Archive | 2009
John Notte; Billy W. Ward
Archive | 2008
John Notte; Stephen Carousso; Billy W. Ward
Archive | 2012
Billy W. Ward; John Notte; Lewis S Falkus; Randolph G Percival; Raymond Hill; Alexander Grokholsky; Richard Comunale
