Bipin Parekh
Entegris
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Bipin Parekh.
advanced semiconductor manufacturing conference | 2006
Michael Clarke; Annie Xia; Joseph E. Smith; Bipin Parekh
In this paper we describe the design and development of point-of-use UPW (ultra pure water) components and systems for the immersion application. The paper addresses the water quality needs for the immersion lithography process and presents key contaminant removal techniques and performance results. POU water delivery systems are designed based upon individual customer needs
Archive | 2004
Bipin Parekh; Jeffrey J. Spiegelman; Robert S. Zeller; Russell J. Holmes
Archive | 2003
Bipin Parekh; Saksatha Ly; Jieh-Hwa Shyu; John E. Pillion
Archive | 2003
Bipin Parekh; Rajnikant B. Patel; Kwok-Shun Cheng
Archive | 2002
Bipin Parekh; Saksatha Ly; Quinwel Wu
Archive | 2006
Bipin Parekh; Robert S. Zeller; Russell J. Holmes; Jeffrey J. Spiegelman
Archive | 2007
Bipin Parekh; Annie Xia; Michael Clarke; Joseph E. Smith
Ultrapure water | 2007
Bipin Parekh; Annie Xia; Michael Clarke; Joseph E. Smith
Ultrapure water | 2008
Bipin Parekh
Archive | 2010
Bipin Parekh; Jeffrey J. Spiegelman; Robert S. Zeller; Russell J. Holmes
