Is this you? Create Your Porfile
Avatar

Bipin Parekh

Entegris

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Bipin Parekh is active.

Explore More

Publication

Featured researches published by Bipin Parekh.

advanced semiconductor manufacturing conference | 2006

Point-of-Use Ultra-Pure Water for Immersion Lithography

Michael Clarke; Annie Xia; Joseph E. Smith; Bipin Parekh

In this paper we describe the design and development of point-of-use UPW (ultra pure water) components and systems for the immersion application. The paper addresses the water quality needs for the immersion lithography process and presents key contaminant removal techniques and performance results. POU water delivery systems are designed based upon individual customer needs

Archive | 2004

Lithographic projection apparatus, purge gas supply system and gas purging method

Bipin Parekh; Jeffrey J. Spiegelman; Robert S. Zeller; Russell J. Holmes

Archive | 2003

Method and apparatus for treating fluids

Bipin Parekh; Saksatha Ly; Jieh-Hwa Shyu; John E. Pillion

Archive | 2003

Hollow fiber membrane contact apparatus and process

Bipin Parekh; Rajnikant B. Patel; Kwok-Shun Cheng

Archive | 2002

Process for degassing an aqueous plating solution

Bipin Parekh; Saksatha Ly; Quinwel Wu

Archive | 2006

Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application

Bipin Parekh; Robert S. Zeller; Russell J. Holmes; Jeffrey J. Spiegelman

Archive | 2007

Apparatus and method for conditioning an immersion fluid

Bipin Parekh; Annie Xia; Michael Clarke; Joseph E. Smith

Ultrapure water | 2007

Advances in seawater desalination technology lower cost and energy barriers

Bipin Parekh; Annie Xia; Michael Clarke; Joseph E. Smith

Ultrapure water | 2008

EMERGING APPLICATIONS OF HIGH-PURITY WATER : MEETING CHALLENGES OF ADVANCED SEMICONDUCTOR MANUFACTURING

Bipin Parekh

Archive | 2010

***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***Lithographic projection apparatus, purge gas supply system and gas purging method

Bipin Parekh; Jeffrey J. Spiegelman; Robert S. Zeller; Russell J. Holmes

Explore More

Collaboration

Dive into the Bipin Parekh's collaboration.

Top Co-Authors
Avatar

Jeffrey J. Spiegelman

Entegris

View shared research outputs
Top Co-Authors
Avatar

Robert S. Zeller

Entegris

View shared research outputs
Top Co-Authors
Avatar

Russell J. Holmes

Entegris

View shared research outputs
Top Co-Authors
Avatar

Saksatha Ly

Entegris

View shared research outputs
Top Co-Authors
Avatar

Kwok-Shun Cheng

Entegris

View shared research outputs
Top Co-Authors
Avatar

Rajnikant B. Patel

Entegris

View shared research outputs
Top Co-Authors
Avatar

Annie Xia

Entegris

View shared research outputs
Top Co-Authors
Avatar

Jieh-Hwa Shyu

Entegris

View shared research outputs
Top Co-Authors
Avatar

John E. Pillion

Entegris

View shared research outputs
Top Co-Authors
Avatar

Joseph E. Smith

Entegris

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge