Bodong Li

A Surface Acoustic Wave Passive and Wireless Sensor for Magnetic Fields, Temperature, and Humidity

In this paper, we report an integrated single-chip surface acoustic wave sensor with the capability of measuring magnetic field, temperature, and humidity. The sensor is fabricated using a thermally sensitive LiNbO3 substrate, a humidity sensitive hydrogel coating, and a magnetic field sensitive impedance load. The sensor response to individually and simultaneously changing magnetic field, temperature and humidity is characterized by connecting a network analyzer directly to the sensor. Analytical models for each measurand are derived and used to compensate noise due to cross sensitivities. The results show that all three measurands can be monitored in parallel with sensitivities of 75 ppm/°C, 0.13 dB/%R.H. (at 50%R.H.), 0.18 dB/Oe and resolutions of 0.1 °C, 0.4%R.H., 1 Oe for temperature, humidity and magnetic field, respectively. A passive wireless measurement is also conducted on a current line using, which shows the sensors capability to measure both temperature and current signals simultaneously.

Optimization of Autonomous Magnetic Field Sensor Consisting of Giant Magnetoimpedance Sensor and Surface Acoustic Wave Transducer

This paper presents a novel autonomous thin film magnetic field sensor consisting of a tri-layer giant magnetoimpedance sensor and a surface acoustic wave transponder. Double and single electrode interdigital transducer (IDT) designs are employed and compared. The integrated sensor is fabricated using standard microfabrication technology. The results show the double electrode IDT has an advantage in terms of the sensitivity. In order to optimize the matching component, a simulation based on P-matrix is carried out. A maximum change of 2.4 dB of the reflection amplitude and a sensitivity of 0.34 dB/Oe are obtained experimentally.

Three dimensional simulation of giant magneto-impedance effect in thin film structures

In this paper, a three dimensional model for the giant magneto-impedance (GMI) effect in thin film structures is developed using the finite element method (FEM) with a GMI permeability model embedded. One-layer, three-layer, and five-layer thin film structures are simulated. The GMI effect and the sensitivity are calculated as a function of the external magnetic field, driving frequency, and the thickness of the magnetic layers. The results show that the five-layer structure has the best performance, which is in accordance with experimental results. The GMI ratio and the sensitivity first improve with the increasing thickness of the magnetic layer but reach saturation at a certain value of the thickness. In a five-layer structure, saturation of the GMI effect becomes effective at about 3 μm thickness of the magnetic layers, where a GMI ratio of 1125% was obtained, with a corresponding sensitivity of 0.37%/A/m (29.6%/Oe).

Integration of thin film giant magnetoimpedance sensor and surface acoustic wave transponder

Passive and remote sensing technology has many potential applications in implantable devices, automation, or structural monitoring. In this paper, a tri-layer thin film giant magnetoimpedance (GMI) sensor with the maximum sensitivity of 16%/Oe and GMI ratio of 44% was combined with a two-port surface acoustic wave (SAW) transponder on a common substrate using standard microfabrication technology resulting in a fully integrated sensor for passive and remote operation. The implementation of the two devices has been optimized by on-chip matching circuits. The measurement results clearly show a magnetic field response at the input port of the SAW transponder that reflects the impedance change of the GMI sensor.

Development of a passive and remote magnetic microsensor with thin-film giant magnetoimpedance element and surface acoustic wave transponder

This paper presents the development of a wireless magnetic field sensor consisting of a three-layer thin-film giant magnetoimpedance sensor and a surface acoustic wave device on one substrate. The goal of this integration is a passive and remotely interrogated sensor that can be easily mass fabricated using standard microfabrication tools. The design parameters, fabrication process, and a model of the integrated sensor are presented together with experimental results of the sensor.

Magnetic polymer nanocomposites for sensing applications

We report the fabrication and characterization of magnetic polymer nanocomposites for a wide range of sensing applications. The composites are made of magnetic nanowires (NWs) incorporated into polymers such as polydimethylsiloxane (PDMS) or UV sensitive SU-8. The developed composites utilize the permanent magnetic behavior of the NWs, allowing remote operation without an additional magnetic field to magnetize the NWs, which simplifies miniaturization and integration in microsystems. In addition, the nanocomposite benefits from the easy patterning of the polymer leading to a corrosion resistant, highly elastic, and permanent magnetic material that can be used to develop highly sensitive systems. Nanocomposite pillars are realized and integrated on magnetic sensor elements to achieve highly sensitive and power efficient flow and tactile sensors. The developed flow sensor can detect air and water flow at a power consumption as little as 80 nW and a resolution up to 15 μm/s with easily modifiable performance. A tactile sensor element prototype is realized using the same concept, where a pressure range of 0-169 kPa is detected with a resolution of up to 1.3 kPa.

Integrated passive and wireless sensor for magnetic fields, temperature and humidity

This paper presents a surface acoustic wave-based passive and wireless sensor that can measure magnetic field, temperature and humidity. A thin film giant magnetoimpedance sensor, a thermally sensitive LiNbO3 substrate and a humidity sensitive hydrogel are integrated together with a surface acoustic wave transducer to realize the multifunctional sensor. The device is characterized using a network analyzer under sequentially changing humidity, temperature and magnetic field conditions. The first hand results show the sensor response to all three sensing parameters with small temperature interference on the magnetic signals.

Flexible magnetoimpidence sensor

Recently, flexible electronic devices have attracted increasing interest, due to the opportunities they promise for new applications such as wearable devices, where the components are required to flex during normal use[1]. In this light, different magnetic sensors, like microcoil, spin valve, giant magnetoresistance (GMR), magnetoimpedance (MI), have been studied previously on flexible substrates.

Optimized 425MHz passive wireless magnetic field sensor

A passive, magnetic field sensor consisting of a 425 MHz surface acoustic wave device loaded with a giant magnetoimpedance element is developed. The GMI element with a multilayer structure composed of Ni80Fe20/Cu/Ni80Fe20, is fabricated on a 128° Y-X cut LiNbO3 LiNbO3 substrate. The integrated sensor is characterized with a network analyzer through an S-parameter measurement. Upon the application of a magnetic field, a maximum magnitude change and phase shift of 7.8 dB and 27 degree, respectively, are observed. Within the linear region, the magnetic sensitivity is 1.6 dB/Oe and 5 deg/Oe.