Boris Fishkin
Applied Materials
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Publication
Featured researches published by Boris Fishkin.
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms | 1991
Samuel Leung; Babak Adibi; Steve Moffatt; Boris Fishkin; Pat Kinney
Abstract Real time monitoring of particles in the process chamber and the roughing line of high current implanters has recently been of invaluable assistance to equipment manufacturers and fabrication Une process engineers. Earlier in situ particle monitors were limited in their performance by the size (>0.5 μm), velocity ( 0.22 μm, installed in a PI9200 ion implanter are discussed here. It is demonstrated that an equipment engineer can study, test, and improve autoclean cycles with the effect of any hardware change. The development of SPC charts and possible processing interlocks are discussed.
Archive | 2000
Boris Fishkin; Jianshe Tang; Brian J. Brown
Archive | 1994
Boris Fishkin; Seiji Sato; Robert B. Lowrance
Archive | 2007
Boris Fishkin; Michael Los Altos Sherrard
Archive | 1998
Boris Fishkin; Charles C. Garretson; Peter McKeever; Thomas H. Osterheld; Gopalakrishna B. Prabhu; Doyle E. Bennett; Benjamin A. Bonner; Sidney P. Huey
Archive | 1998
Daniel Kennedy; Boris Fuksshimov; Victor Belitsky; Boris Fishkin; Kyle Brown; Tom Osterheld; Jeff Campbell Beeler; Ginetto Addiego
Archive | 1997
Boris Fishkin; John S. Hearne; Robert B. Lowrance
Archive | 2005
Younes Achkire; Alexander N. Lerner; Boris Govzman; Boris Fishkin; Michael Sugarman; Rashid Mavliev; Haoquan Fang; Shijian Li; Guy Shirazi; Jianshe Tang
Archive | 2000
Daniel Kennedy; Boris Fuksshimov; Victor Belitsky; Boris Fishkin; Kyle Brown; Tom Osterheld; Jeff Campbell Beeler; Ginetto Addiego
Archive | 1998
Boris Fishkin; John S. Hearne; Robert B. Lowrance
