Alexander N. Lerner | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Alexander N. Lerner is active.

Explore More

Publication

Featured researches published by Alexander N. Lerner.

Archive | 2003

Multi-chemistry plating system

Michael X. Yang; Ming Xi; Russell C. Ellwanger; Eric B. Britcher; Bernardo Donoso; Lily L. Pang; Svetlana Sherman; Henry Ho; Anh N. Nguyen; Alexander N. Lerner; Allen L. D'Ambra; Arulkumar Shanmugasundram; Tetsuya Ishikawa; Yevgeniy Rabinovich; Dmitry Lubomirsky; Yeuk-Fai Edwin Mok; Son T. Nguyen

Archive | 2008

Temperature measurement and control of wafer support in thermal processing chamber

Khurshed Sorabji; Alexander N. Lerner; Joseph M. Ranish; Aaron Muir Hunter; Bruce E. Adams; Mehran Behdjat; Rajesh S. Ramanujam

Archive | 2008

Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber

Blake Koelmel; Alexander N. Lerner; Joseph M. Ranish; Kedarnath Sangam; Khurshed Sorabji

Archive | 2011

Transparent reflector plate for rapid thermal processing chamber

Blake Koelmel; Aaron Muir Hunter; Alexander N. Lerner

Archive | 2007

Rapid conductive cooling using a secondary process plane

Khurshed Sorabji; Alexander N. Lerner

Archive | 2005

Single wafer dryer and drying methods

Younes Achkire; Alexander N. Lerner; Boris Govzman; Boris Fishkin; Michael Sugarman; Rashid Mavliev; Haoquan Fang; Shijian Li; Guy Shirazi; Jianshe Tang

Archive | 2002