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Bradley O. Stimson

Applied Materials

Publication

Featured researches published by Bradley O. Stimson.

Archive | 1998

Method and apparatus for generating a plasma

Ivo Raaijmakers; Bradley O. Stimson; John C. Forster

Archive | 2001

Pulsed-mode RF bias for side-wall coverage improvement

John C. Forster; Praburam Gopalraja; Bradley O. Stimson; Liubo Hong

Archive | 2002

Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck

David Loo; Jr-Jyan Chen; Kenny King-Tai Ngan; Bradley O. Stimson

Archive | 1998

Apparatus for providing RF return current path control in a semiconductor wafer processing system

Ayad Al-Shaikh; Michael Rosenstein; Bradley O. Stimson; Jianming Fu; Praburam Gopalraja

Archive | 1997

Darkspace shield for improved RF transmission in inductively coupled plasma sources for sputter deposition

John C. Forster; Bradley O. Stimson; Zheng Xu

Archive | 1997

Recessed coil for generating a plasma

Anantha K. Subramani; John C. Forster; Bradley O. Stimson; Sergio Edelstein; Howard Grunes; Avi Tepman; Zheng Xu

Archive | 1996

Rf match detector circuit with dual directional coupler

Bradley O. Stimson

Archive | 1995

Inductively coupled plasma reactor with top electrode for enhancing plasma ignition

John C. Forster; Barney M. Cohen; Bradley O. Stimson; George Proulx

Archive | 1998

Use of variable impedance having rotating core to control coil sputter distribution

Bradley O. Stimson; Kenneth Smyth; Praburam Gopalraja

Archive | 1996

RF plasma power supply combining technique for increased stability

Bradley O. Stimson; Paul W Rummel

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