Bradley O. Stimson

Method and apparatus for generating a plasma

Pulsed-mode RF bias for side-wall coverage improvement

Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck

Apparatus for providing RF return current path control in a semiconductor wafer processing system

Darkspace shield for improved RF transmission in inductively coupled plasma sources for sputter deposition

Recessed coil for generating a plasma

Rf match detector circuit with dual directional coupler

Inductively coupled plasma reactor with top electrode for enhancing plasma ignition

Use of variable impedance having rotating core to control coil sputter distribution

RF plasma power supply combining technique for increased stability