Brankica Sikimic

A global model for the afterglow of pure argon and of argon with negatively charged dust particles

Zero-dimensional, space-averaged global models of argon dust-free and dusty afterglow plasmas are developed, which describe the time behaviour of electron ne(t) and Ar ∗ metastable nm(t) densities. The theoretical description is based on the assumption that the free electron density is smaller than the dust charge density. In pure argon, fairly good agreement with the experimentally measured densities and their decay times in the afterglow is obtained when the electron energy loss term to the chamber walls is included in the electron energy balance equation. In dusty plasma afterglow, the agreement between theory and experiment is less satisfactory. The calculated metastable density is 3 times smaller than the measured one and the electron decay is much faster in the late afterglows. The difference should probably arise from the assumption that the electron energy distribution function is Maxwellian. Different sources of secondary electrons in the dusty plasma afterglow are analysed. Comparison of the model with experimental results of argon dusty plasma suggests that the metastable pooling could be the source of the experimentally observed electron density increase in the early afterglow but electron generation from metastable–dust interactions cannot be fully discarded. (Some figures in this article are in colour only in the electronic version)

Monitoring of hydrocarbon concentrations in dust-producing RF plasmas

In Ar and He radio-frequency (RF) plasmas with admixtures of C2H2 and CH4 the hydrocarbon chemistry has been studied in relation to dust particle formation by means of infrared tunable diode laser absorption spectroscopy (TDLAS) combined with Fourier transform infrared (FTIR) spectroscopy. The experiments were performed in a RF capacitively coupled parallel plate reactor at a frequency of f = 13.56 MHz, a pressure of p = 0.1 mbar and a flow rate of Φ = 8 sccm of Ar or He with admixtures of 0.5 sccm C2H2 or 1 sccm CH4. The power was P = 15 W. Using TDLAS, the temporal evolution of the concentrations of the methyl radical and of four stable molecules, C2H2, CH4, C2H4 and CO, was monitored in the plasma. Simultaneously, the growth process of the dust particles was analysed by FTIR spectroscopy. The degree of dissociation of the acetylene precursor was found to be nearly constant in the range of 96% under stabilized conditions for both the Ar and He plasmas. In contrast, the degree of dissociation of the methane precursor varied between 45% and 90% depending (i) on the appearance of dust particles in the reactor volume and (ii) on the Ar or He plasma conditions. The methyl radical concentration was found to be in the range of 1011 molecules cm−3. The concentrations of all hydrocarbon species were strongly correlated with the dynamic of the dust formation. Fragmentation efficiencies of acetylene (RF (C2 H2) = 3.2 × 1016 molecules J−1) and of methane (RF (CH4) = (0.16–2.5) × 1016 molecules J−1) and conversion efficiencies to the produced hydrocarbons (RC = (0.23–8.5) × 1014 molecules J−1) could be estimated in dependence on the discharge conditions in the RF plasma.

Dynamics of pulsed reactive RF discharges in response to thin film deposition

A power-modulated radio-frequency (f = 13.56 MHz) argon plasma supplied by reactive acetylene to deposit an amorphous hydrocarbon film on the electrodes is studied. The effects of gradual film deposition on electron density, electron temperature, argon metastable Arm(3P2) density, and dc-bias voltage are investigated. The time evolutions of plasma parameters during a pulsing cycle are studied as a function of the applied RF power and the thickness of the deposited film. Analytical estimations show a slower expansion of the sheath size and a slower decay of the ion flux after film deposition on the electrodes. The observed changes in the plasma parameters during the power-on and afterglow phases of the pulsed plasma can be correlated with the presence of impurities desorbed from the chamber walls in the discharge volume.

Time Evolution of the Electron and Ar* Metastable Atom Densities in Pulsed Plasmas

Metastable and electron densities of pulsed argon plasma containing nano‐sized particles were measured by the means of Laser Absorption Spectroscopy and Microwave Interferometry, respectively. Laser Induced Fluorescence was probing the Ar* metastable axial distribution during one dust growing cycle. The experimental results of the dust‐free and dusty plasma afterglow were compared to the results obtained by a global model.