Bunbunoshin Tomiyasu

High spatial resolution 3D analysis of materials using gallium focused ion beam secondary ion mass spectrometry (FIB SIMS)

Abstract The sharpness and high density of focused ion beams (FIB) enable micromachining of materials. When a gallium FIB is used as a primary beam for secondary ion mass spectrometry (SIMS), 2D analysis with submicron resolution is easily achieved. In situ combination of micromachining and high spatial resolution analysis brings a new field of microbeam analysis of materials. The gallium FIB SIMS apparatus was developed by combining a FIB and a plane-focusing mass analyzer equipped with a multichannel ion detection system (120 channel). Both a high-spatial resolution and a large sputtering rate are realized. Multielement parallel detection has a great advantage for obtaining precise distribution of elements in microstructure samples. In this paper, a new type of 3D analysis and depth profiling technique is introduced and applied to single particle analyses. A spatial resolution of 50 nm for 3D analysis and a depth resolution up to 5 nm were realized by using these methods.

TOF-SIMS measurements for toxic air pollutants adsorbed on the surface of airborne particles

Abstract Three kinds of particulate matter were collected: diesel and gasoline exhaust particles emitted directly from exhaust nozzle, and suspended particulate matter (SPM) near the traffic route. Soxhlet extraction was performed on each sample. By gas-chromatograph–mass spectrometer (GC–MS) analysis of these extracts, di-ethyl phthalate and di- n -butyl phthalate were detected from the extract of SPM and diesel exhaust particles (DEPs). Because these phthalates were sometimes suspected as contamination, time-of-flight secondary ion mass spectrometry (TOF-SIMS) measurements were also performed on the samples collected at the same environment. By comparing obtained spectra, it is clear that these environmental endocrine disrupters (EEDs) were adsorbed on DEP surface. Thus, we concluded that the combination of conventional method and TOF-SIMS measurement is one of the most powerful techniques for analyzing the toxic air pollutants adsorbed on SPM surface.