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Featured researches published by M. Nojima.


Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 2016

Development of a mass spectrometer using two rotating electric fields

M. Nojima; Yuki Anai; Masanao Hotta; Satoshi Kurumi; Kaoru Suzuki; Tatsuya Adachi; Takashi Kusanagi; Kosuke Moritani

The authors propose a new principle for a mass analyzer involving a pair of rotating electric fields (REFs). Its design is reviewed from the perspectives of electronics, ion optics, and operating principle. The use of REFs to separate ions by mass was demonstrated by introducing a Ga focused-ion-beam column directly into the REFs optical system. By optimizing the system phase contrast, the 69Ga+ ions were made to converge to the central axis while the 71Ga+ formed an annular pattern. Asymmetries in annular patterns are caused by nonuniformity in the alternating current voltage of each REF electrode. By varying the frequency, the locations of the 69Ga+ and 71Ga+ projections can be exchanged between the center and exterior.


Microscopy and Microanalysis | 2014

Development of Au-GCIB Dynamic SIMS and Cluster Size Filtering System

M. Nojima; Masato Suzuki; T. Adachi; S. Hotta; Makiko Fujii; Toshio Seki; Jiro Matsuo

1 Tokyo University of Science, RIST, 2641 Yamazaki, Noda, JP-278-8510 Chiba 2 Tokyo University of Science, Faculty of Sci. and Tech., 2641 Yamazaki, Noda, JP-278-8510 Chiba 3 Office Tandem. LCC., 2-16-8 Nishi-cho Kokubunji-shi, JP185-0035 Tokyo 4 Quantum Science and Engineering Center, Kyoto University, Gokasho, Uji, JP-611-0011 Kyoto 5 Department of Nuclear Engineering, Kyoto University, Gokasho, Uji, JP-611-0011 Kyoto


Applied Surface Science | 2004

Evaluation of the nano-beam SIMS apparatus

M. Nojima; Masayuki Toi; A. Maekawa; Bunbunoshin Tomiyasu; Tetsuo Sakamoto; Masanori Owari; Yoshimasa Nihei


Surface and Interface Analysis | 2008

Stress of needle specimen on the three‐dimensional atom probe (3DAP)

Norihito Mayama; C. Yamashita; Takashi Kaito; M. Nojima; Masanori Owari


Surface and Interface Analysis | 2008

Development of preset-type sample stage in three-dimensional atom probe

S. Ito; Tetsuya Kaneko; C. Yamashita; Takashi Kaito; Tatsuya Adachi; Tatsuo Iwata; Norihito Mayama; M. Nojima; Masahiro Taniguchi; Masanori Owari


Applied Surface Science | 2003

Nanoscale SIMS analysis: the next generation in local analysis

M. Nojima; Bunbunoshin Tomiyasu; Y Kanda; Masanori Owari; Yoshimasa Nihei


Surface and Interface Analysis | 2006

Shave‐off depth profiling of transparent conductive films and data analysis of the profile

K. Nakamura; Y. Ishikawa; K. Utsumi; H. Iigusa; Risa Tanaka; Y. Ishizaki; Takeshi Yamamoto; A. Maekawa; Masanori Owari; M. Nojima; Yoshimasa Nihei


Surface and Interface Analysis | 2006

Shave‐off depth profiling of dendritic short‐circuit growth caused by ion migration

Takeshi Yamamoto; A. Maekawa; Y. Ishizaki; Risa Tanaka; Masanori Owari; M. Nojima; Yoshimasa Nihei


Applied Surface Science | 2006

Shave-off depth profiling: Depth profiling with an absolute depth scale

M. Nojima; A. Maekawa; Takeshi Yamamoto; Bunbunoshin Tomiyasu; Tetsuo Sakamoto; Masanori Owari; Yoshimasa Nihei


Surface and Interface Analysis | 2008

Evaluation of the instrument for three‐dimensional atom probe (3DAP)

Tetsuya Kaneko; S. Ito; C. Yamashita; Norihito Mayama; Tatsuo Iwata; M. Nojima; Masahiro Taniguchi; Masanori Owari

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Yoshimasa Nihei

Tokyo University of Science

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Tatsuya Adachi

Japan Society for the Promotion of Science

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Y. Ishizaki

Tokyo University of Science

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A. Maekawa

Tokyo University of Science

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