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Chen Li-Mei

Bayer

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Publication

Featured researches published by Chen Li-Mei.

Archive | 2002

Method for the chemical-mechanical polishing of isolation layers based on sti technology at elevated temperatures

Vogt Kristina; Puppe Lothar; Min Chun-Kuo; Chen Li-Mei

Archive | 2007

Composition of coating precursor

Hung Chuan-Ya; Wang Chao-Jen; Chen Li-Mei

Archive | 2005

Slurry additives for Cu CMP of semiconductor devices

Chen Li-Mei; Min Chun-Kuo; Wang Chao-Jen; Tsai Ching-Lung

Archive | 2005

A metal-oxide and the preparation method of the same

Hung Chuan-Ya; Wang Chao-Jen; Chou Te-Kuei; Chen Li-Mei

Archive | 2002

POLISHING SLURRY FOR CHEMICAL MECHANICAL POLISHING OF SILICA FILM

Vogt Kristina; Puppe Lothar Dipl Chem Dr; Min Chun-Kuo; Chen Li-Mei; Lu Hsin-Hsen

Archive | 2002

Polishing slurry for the chemical-mechanical polishing of silica films containing a colloidal silica abrasive and a quaternary ammonium salt

Vogt Kristina; Puppe Lothar; Min Chun-Kuo; Chen Li-Mei; Lu Hsin-Hsen

Archive | 2002

POLISHING SUSPENSION FOR CHEMICAL-MECHANICAL POLISH OF SILICIUM-DIOXIDE FILMS

Chen Li-Mei; Lu Hsin-Hsen; Min Chun-Kuo; Puppe Lothar; Vogt Kristina

Archive | 2002

SLURRY FOR CHEMICAL-MECHANICAL POLISHING OF SILICA FILMS

Chen Li-Mei; Lu Hsin-Hsen; Min Chun-Kuo; Puppe Lothar; Vogt Kristina

Archive | 2002

Polishing suspension for chemical and mechanical polishing of silicon dioxide films

Vogt Kristina; Puppe Lothar; Min Chun-Kuo; Chen Li-Mei; Lu Hsin-Hsen

Archive | 2002

Polierslurry für das chemisch-mechanische Polieren von Siliciumdioxid-Filmen

Vogt Kristina; Puppe Lothar; Min Chun-Kuo; Chen Li-Mei; Lu Hsin-Hsen

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Collaboration

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Min Chun-Kuo

Bayer

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Vogt Kristina

Bayer

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Puppe Lothar

Bayer

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Lu Hsin-Hsen

Industrial Technology Research Institute

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Wang Chao-Jen

Industrial Technology Research Institute

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Lu Hsin-Hsen

Industrial Technology Research Institute

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Puppe Lothar Dipl Chem Dr

Bayer

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Li Lih-Ping

Industrial Technology Research Institute

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