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Vogt Kristina

Bayer

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Publication

Featured researches published by Vogt Kristina.

Archive | 1998

Silicon boronitride ceramic powder is produced

Vogt Kristina; Passing Gerd

Archive | 2002

Method for the chemical-mechanical polishing of isolation layers based on sti technology at elevated temperatures

Vogt Kristina; Puppe Lothar; Min Chun-Kuo; Chen Li-Mei

Archive | 2005

POLIERMITTEL UND VERFAHREN ZUR HERSTELLUNG PLANARER SCHICHTEN

Vogt Kristina; Pantke Dietrich; Puppe Lothar; Kirchmeyer Stephan

Archive | 2003

Polishing abrasive and process for producing planar layers

Vogt Kristina; Pantke Dietrich; Puppe Lothar; Kirchmeyer Stephan

Archive | 2003

CHEMICAL-MECHANICAL POLISHING COMPOSITION FOR METAL AND METAL/DIELECTRIC SUBSTANCE STRUCTURAL MATERIAL, HAVING HIGH SELECTIVITY

Puppe Lothar; Passing Gerd; Vogt Kristina; Terzieva Valentina

Archive | 2002

POLISHING SLURRY FOR CHEMICAL MECHANICAL POLISHING OF SILICA FILM

Vogt Kristina; Puppe Lothar Dipl Chem Dr; Min Chun-Kuo; Chen Li-Mei; Lu Hsin-Hsen

Archive | 2002

Polishing slurry for the chemical-mechanical polishing of silica films containing a colloidal silica abrasive and a quaternary ammonium salt

Vogt Kristina; Puppe Lothar; Min Chun-Kuo; Chen Li-Mei; Lu Hsin-Hsen

Archive | 2002

POLISHING SUSPENSION FOR CHEMICAL-MECHANICAL POLISH OF SILICIUM-DIOXIDE FILMS

Chen Li-Mei; Lu Hsin-Hsen; Min Chun-Kuo; Puppe Lothar; Vogt Kristina

Archive | 2002

Polishing suspension for chemical and mechanical cleaning of metal-dielectric structures

Vogt Kristina; Passing Gerd; Tsai Ming-Shih

Archive | 2002

SLURRY FOR CHEMICAL-MECHANICAL POLISHING OF SILICA FILMS

Chen Li-Mei; Lu Hsin-Hsen; Min Chun-Kuo; Puppe Lothar; Vogt Kristina

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Collaboration

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Puppe Lothar

Bayer

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Chen Li-Mei

Bayer

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Min Chun-Kuo

Bayer

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Passing Gerd

Bayer

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Lu Hsin-Hsen

Industrial Technology Research Institute

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Tsai Ming-Shih

Bayer

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Kirchmeyer Stephan

Bayer

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Pantke Dietrich

Bayer

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Terzieva Valentina

Bayer

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Lu Hsin-Hsen

Industrial Technology Research Institute

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