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Chi-Ming Yang

TSMC

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Publication

Featured researches published by Chi-Ming Yang.

Archive | 2008

Inductive plasma doping

Simon Su-Horng Lin; Chi-Ming Yang; Chyi Shyuan Chern; Chin-Hsiang Lin

Archive | 2010

Integration of bottom-up metal film deposition

Simon Su-Horng Lin; Chi-Ming Yang; Chyi Shyuan Chern; Chin-Hsiang Lin

Archive | 2013

Multi-zone temperature control for semiconductor wafer

Chun-Lin Chang; Hsin-Hsien Wu; Zin-Chang Wei; Chi-Ming Yang; Chyi Shyuan Chern; Jun-Lin Yeh; Jih-Jse Lin; Jo Fei Wang; Ming-Yu Fan; Jong-I Mou

Archive | 2009

High Temperature Anneal for Aluminum Surface Protection

Kuo Bin Huang; Ssu-Yi Li; Ryan Chia-Jen Chen; Chi-Ming Yang; Chyi Shyuan Chern; Chin-Hsiang Lin

Archive | 2008

GATE STRUCTURE INCLUDING MODIFIED HIGH-K GATE DIELECTRIC AND METAL GATE INTERFACE

Simon Su-Horng Lin; Chi-Ming Yang; Chyi-Shyuan Chern; Chin-Hsiang Lin

Archive | 2008

Spinner and method of cleaning substrate using the spinner

Tzu-Jeng Hsu; Chi-Ming Yang; Chyi Shyuan Chern

Archive | 2011

DEVICE WITH ALUMINUM SURFACE PROTECTION

Kuo Bin Huang; Ssu-Yi Li; Ryan Chia-Jen Chen; Chi-Ming Yang; Chyi Shyuan Chern; Chin-Hsiang Lin

Archive | 2014

N/P METAL CRYSTAL ORIENTATION FOR HIGH-K METAL GATE Vt MODULATION

Simon Su-Horng Lin; Chi-Ming Yang; Chyi Shyuan Chern; Chin-Hsiang Lin

Archive | 2010

MULTI-ZONE SEMICONDUCTOR FURNACE

Hsin-Hsien Wu; Chun-Lin Chang; Chi-Ming Yang

Archive | 2014

Beam Monitoring Device, Method, And System

Chih-Hong Hwang; Chun-Lin Chang; Nai-Han Cheng; Chi-Ming Yang; Chin-Hsiang Lin

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Collaboration

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Chin-Hsiang Lin

TSMC

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Chyi Shyuan Chern

TSMC

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Chun-Lin Chang

TSMC

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Simon Su-Horng Lin

TSMC

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Chih-Hong Hwang

TSMC

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Hsin-Hsien Wu

TSMC

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Kuo Bin Huang

TSMC

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Nai-Han Cheng

TSMC

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Ryan Chia-Jen Chen

TSMC

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Ssu-Yi Li

TSMC

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