Chieh-I Liu

Epitaxial graphene homogeneity and quantum Hall effect in millimeter-scale devices

Quantized magnetotransport is observed in 5.6 × 5.6 mm2 epitaxial graphene devices, grown using highly constrained sublimation on the Si-face of SiC(0001) at high temperature (1900 °C). The precise quantized Hall resistance of [Formula: see text] is maintained up to record level of critical current Ixx = 0.72 mA at T = 3.1 K and 9 T in a device where Raman microscopy reveals low and homogeneous strain. Adsorption-induced molecular doping in a second device reduced the carrier concentration close to the Dirac point (n ≈ 1010 cm-2), where mobility of 18760 cm2/V is measured over an area of 10 mm2. Atomic force, confocal optical, and Raman microscopies are used to characterize the large-scale devices, and reveal improved SiC terrace topography and the structure of the graphene layer. Our results show that the structural uniformity of epitaxial graphene produced by face-to-graphite processing contributes to millimeter-scale transport homogeneity, and will prove useful for scientific and commercial applications.

Preservation of Surface Conductivity and Dielectric Loss Tangent in Large‐Scale, Encapsulated Epitaxial Graphene Measured by Noncontact Microwave Cavity Perturbations

Regarding the improvement of current quantized Hall resistance (QHR) standards, one promising avenue is the growth of homogeneous monolayer epitaxial graphene (EG). A clean and simple process is used to produce large, precise areas of EG. Properties like the surface conductivity and dielectric loss tangent remain unstable when EG is exposed to air due to doping from molecular adsorption. Experimental results are reported on the extraction of the surface conductivity and dielectric loss tangent from data taken with a noncontact resonance microwave cavity, assembled with an air-filled, standard R100 rectangular waveguide configuration. By using amorphous boron nitride (a-BN) as an encapsulation layer, stability of EGs electrical properties under ambient laboratory conditions is greatly improved. Moreover, samples are exposed to a variety of environmental and chemical conditions. Both thicknesses of a-BN encapsulation are sufficient to preserve surface conductivity and dielectric loss tangent to within 10% of its previously measured value, a result which has essential importance in the mass production of millimeter-scale graphene devices demonstrating electrical stability.

Electrical Stabilization of Surface Resistivity in Epitaxial Graphene Systems by Amorphous Boron Nitride Encapsulation

Homogeneous monolayer epitaxial graphene (EG) is an ideal candidate for the development of millimeter-sized devices with single-crystal domains. A clean fabrication process was used to produce EG-based devices, with n-type doping level of the order of 1012 cm–2. Generally, electrical properties of EG, such as longitudinal resistivity, remain unstable when devices are exposed to air due to adsorption of molecular dopants, whose presence shifts the carrier density close to the Dirac point (<1010 cm–2) or into the p-type regime. Here, we report experimental results on the use of amorphous boron nitride (a-BN) as an encapsulation layer, whereby EG can maintain its longitudinal resistivity and have its carrier density modulated. Furthermore, we exposed 12 devices to controlled temperatures of up to 85 °C and relative humidity of up to 85% and reported that an approximately 20 nm a-BN encapsulation thickness is sufficient to preserve their longitudinal resistivity to within 10% of the previously measured value. We monitored the electronic properties of our encapsulated and nonencapsulated EG samples by magnetotransport measurements, using a neodymium iron boron magnet. Our results have essential importance in the mass production of millimeter-scale graphene devices, with stable electrical properties.

Variable range hopping and nonlinear transport in monolayer epitaxial graphene grown on SiC

We report experimental results on variable range hopping (VRH) and nonlinear transport in monolayer epitaxial graphene. In the linear regime in which the conductance is independent of voltage, the resistance curve derivative analysis method can be used to unequivocally determine whether Mott VRH or Efros–Shklovskii VRH is the dominant transport mechanism in our devices. In the nonlinear regime in which the conductance shows a strong dependence on voltage, we find that our experimental results can be successfully described by existing theoretical models. We suggest that the observed vastly different exponents in the threshold voltage–temperature dependence require further experimental and theoretical studies.

Charge Trapping in Monolayer and Multilayer Epitaxial Graphene

We have studied the carrier densities n of multilayer and monolayer epitaxial graphene devices over a wide range of temperatures T. It is found that, in the high temperature regime typically T ≥ 200 K, ln⁡n shows a linear dependence of 1/T, showing activated behavior. Such results yield activation energies ΔE for charge trapping in epitaxial graphene ranging from 196 meV to 34 meV. We find that ΔE decreases with increasing mobility. Vacuum annealing experiments suggest that both adsorbates on EG and the SiC/graphene interface play a role in charge trapping in EG devices.

Examining epitaxial graphene surface conductivity and quantum Hall device stability with Parylene passivation

Homogeneous, single-crystal, monolayer epitaxial graphene (EG) is the one of most promising candidates for the advancement of quantized Hall resistance (QHR) standards. A remaining challenge for the electrical characterization of EG-based quantum Hall devices as a useful tool for metrology is that they are electrically unstable when exposed to air due to the adsorption of and interaction with atmospheric molecular dopants. The resulting changes in the charge carrier density become apparent by variations in the surface conductivity, the charge carrier mobility, and may result in a transition from n-type to p-type conductivity. This work evaluates the use of Parylene C and Parylene N as passivation layers for EG. Electronic transport of EG quantum Hall devices and non-contact microwave perturbation measurements of millimeter-sized areas of EG are both performed on bare and Parylene coated samples to test the efficacy of the passivation layers. The reported results, showing a significant improvement in passivation due to Parylene deposition, suggest a method for the mass production of millimeter-scale graphene devices with stable electrical properties.

Quantum Hall device data monitoring following encapsulating polymer deposition

The information provided in this data article will cover the growth parameters for monolayer, epitaxial graphene, as well as how to verify the layer homogeneity by confocal laser scanning and optical microscopy. The characterization of the subsequently fabricated quantum Hall device is shown for example cases during a series of environmental exposures. Quantum Hall data acquired from a CYTOP encapsulation is also provided. Data from Raman spectroscopy, atomic force microscopy, and other electrical property trends are shown. Lastly, quantum Hall effect data are presented from devices with deposited Parylene C films measuring 10.7 μm and 720 nm. All data are relevant for Rigosi et al. [1].

Weak localization and microwave-irradiated transport in multilayer epitaxial graphene grown on SiC

We have studied weak localization (WL) and microwave-irradiated transport in multilayer graphene grown on SiC(0001). Different scattering channels are identified by analyzing the WL data. Moreover, we have shown that at a fixed ambient temperature, irradiating graphene with a microwave appears to be equivalent to changing the ambient temperature without microwave. We find that both the zero-field resistance of graphene and the WL correction term can be used as reliable thermometers which agree well with each other.