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Dive into the research topics where Choi Soo-Young is active.

Publication


Featured researches published by Choi Soo-Young.


Archive | 2014

Plasma enhanced chemical vapor deposition chamber

Chen Jrjyan Jerry; Choi Soo-Young; Choi Young-Jin; Cui Yi; Park Beom Soo; Tiner Robin L


Archive | 2016

Frame, multi-piece under substrate cover frame and processing chamber

Lee Dong-Suh; Tiner Robin L; White John M; Sterling William Norman; Choi Soo-Young; Zhao Lai; Wang Dapeng; Furuta Gaku


Archive | 2016

Cover frame and handle cavity under frame, combination formula base plate

Dongsuh Lee; R L Tina; John M. White; William N. Sterling; Choi Soo-Young; Zhao Lai; Wang Dapeng; Furuta Manabu


Archive | 2015

Gas diffuser hole design for improving edge uniformity

Zhao Lai; Gu Tianxue; Wang Qunhua; Choi Soo-Young; Lee Dong-Suh; Park Beom-Soo; Yang Hsiao-Lin


Archive | 2015

Multi-layer amorphous silicon structure with improved poly-silicon quality after excimer laser anneal and the method for forming the same

Wang Qunhua; Zhao Lai; Choi Soo-Young


Archive | 2014

Substrate support and method of forming the same

Lee Dong-Suh; Sterling William N; Park Beom Soo; Choi Soo-Young


Archive | 2014

Method of depositing a dielectric layer for adhesion improvement between CVD dielectric film and Cu substrate

Won Tae K; Cui Yi; Park Beom Soo; Choi Soo-Young


Archive | 2014

Substrate support assembly using substrate support pedestal with heater

Furuta Gaku; White John M; Tiner Robin L; Anwar Suhail; Choi Soo-Young


Archive | 2014

Diffuser for a deposition chamber

Zhao Lai; Furuta Gaku; Wang Qunhua; Choi Soo-Young; Lee Dong-Suh; Park Beom-Soo; Yang Hsiao-Ling


Archive | 2014

Metal oxide thin film transistor and method for making the same

Won Tae K; Choi Soo-Young; Yim Dong-Kil; Park Beom Soo

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