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Park Beom Soo

Applied Materials

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Publication

Featured researches published by Park Beom Soo.

Archive | 2014

Plasma enhanced chemical vapor deposition chamber

Chen Jrjyan Jerry; Choi Soo-Young; Choi Young-Jin; Cui Yi; Park Beom Soo; Tiner Robin L

Archive | 2018

Diffuser With Corner HCG

Zhao Lai; Furuta Gaku; Choi Soo Young; Park Beom Soo

Archive | 2018

TEMPERATURE SENSOR FOR END POINT DETECTION DURING PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION CHAMBER CLEAN

Peng Fei; Park Beom Soo; Choi Soo Young; Yadav Sanjay D; Choi Young Jin; Joshi Himanshu

Archive | 2018

ENDPOINT DETECTION FOR A CHAMBER CLEANING PROCESS

Budiarto Edward; Park Beom Soo; Choi Soo Young; Peng Fei; Egan Todd

Archive | 2017

Organic light-emitting diode device and method of deposition an encapsulation structure having the same

Choi Young Jin; Park Beom Soo; Choi Soo Young

Archive | 2017

Gas distribution system and processing chamber

White John M; Anwar Suhail; Kudela Jozef; Sorensen Carl A; Won Tae Kyung; Cho Seon-Mee; Choi Soo Young; Park Beom Soo; Johnston Benjamin M

Archive | 2017

NON-SHADOW FRAME PLASMA PROCESSING CHAMBER

Choi Young-Jin; Park Beom Soo; Lee Dong-Suh; Sterling William Norman; Tiner Robin L; Kurita Shinichi; Anwar Suhail; Choi Soo Young; Cui Yi; Zhao Lia; Wang Dapeng

Archive | 2017

RF RETURN STRAP SHIELDING COVER

Cui Yi; Tiner Robin L; Park Beom Soo; Choi Soo Young; Kurita Shinichi

Archive | 2015

Corner spoiler for improving profile uniformity, and shadow frame and processing chamber using the same

Zhao Lai; Furuta Gaku; Wang Qunhua; Tiner Robin L; Park Beom Soo; Choi Soo Young; Yadav Sanjay D

Archive | 2015

Gas confiner assembly and processing chamber using the same

Zhao Lai; Wang Qunhua; Tiner Robin L; Choi Soo Young; Park Beom Soo

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Collaboration

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Choi Soo Young

Applied Materials

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Tiner Robin L

Applied Materials

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Cui Yi

Applied Materials

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Anwar Suhail

Applied Materials

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Won Tae Kyung

Applied Materials

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Zhao Lai

Applied Materials

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Choi Young-Jin

Applied Materials

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Kurita Shinichi

Applied Materials

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Lee Dong-Suh

Applied Materials

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Yim Dong-Kil

Applied Materials

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