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Dive into the research topics where Christine H. Tsau is active.

Publication


Featured researches published by Christine H. Tsau.


Archive | 2009

Apparatus and Method of Wafer Bonding Using Compatible Alloy

John R. Martin; Timothy J. Frey; Christine H. Tsau


Archive | 2009

Substrate bonding with bonding material having rare earth metal

John R. Martin; Christine H. Tsau; Timothy J. Frey


Archive | 2010

Reduced Stiction MEMS Device with Exposed Silicon Carbide

Li Chen; Christine H. Tsau; Thomas Kieran Nunan; Kuang L. Yang


Archive | 2010

Silicon-Rich Nitride Etch Stop Layer for Vapor HF Etching in MEMS Device Fabrication

Christine H. Tsau; Thomas Kieran Nunan


Archive | 2010

Method of bonding wafers

Thomas Kieran Nunan; Changhan Yun; Christine H. Tsau


Archive | 2013

Sealed MEMS devices with multiple chamber pressures

Christine H. Tsau; Li Chen; Kuang L. Yang


Archive | 2013

Apparatus and Method for Forming Alignment Features for Back Side Processing of a Wafer

Christine H. Tsau; William D. Sawyer; Thomas Kieran Nunan


Archive | 2011

Method of Substrate Bonding with Bonding Material Having Rare Earth Metal

John R. Martin; Christine H. Tsau; Timothy J. Frey


Archive | 2013

Method for Creating Asperities in Metal for Metal-to-Metal Bonding

Christine H. Tsau


Archive | 2009

Appareil et procédé de liaison de tranches au moyen d’un alliage compatible

John R. Martin; Timothy J. Frey; Christine H. Tsau

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