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Thomas Kieran Nunan

Analog Devices

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Publication

Featured researches published by Thomas Kieran Nunan.

Archive | 2006

Micromachined microphone and multisensor and method for producing same

John R. Martin; Timothy J. Brosnihan; Craig E. Core; Thomas Kieran Nunan; Jason W. Weigold; Xin Zhang

Archive | 2004

MEMS DEVICE WITH CONDUCTIVE PATH THROUGH SUBSTRATE

Kieran P. Harney; Lawrence E. Felton; Thomas Kieran Nunan; Susan A. Alie; Bruce K. Wachtmann

Archive | 2006

Single crystal silicon sensor with additional layer and method of producing the same

Thomas Kieran Nunan; Timothy J. Brosnihan

Archive | 2005

Method of forming a MEMS device

Thomas Kieran Nunan; Timothy J. Brosnihan

Archive | 2013

MEMS Device with Outgassing Shield

Li Chen; Thomas Kieran Nunan; Kuang L. Yang

Archive | 2010

Reduced Stiction MEMS Device with Exposed Silicon Carbide

Li Chen; Christine H. Tsau; Thomas Kieran Nunan; Kuang L. Yang

Archive | 2010

Silicon-Rich Nitride Etch Stop Layer for Vapor HF Etching in MEMS Device Fabrication

Christine H. Tsau; Thomas Kieran Nunan

Archive | 2010

Method of bonding wafers

Thomas Kieran Nunan; Changhan Yun; Christine H. Tsau

Archive | 2013

Apparatus and method for preventing stiction of MEMS devices encapsulated by active circuitry

Li Chen; Thomas Kieran Nunan; Kuang L. Yang

Archive | 2008

Polysilicon Deposition and Anneal Process Enabling Thick Polysilicon Films for MEMS Applications

Thomas Kieran Nunan

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Li Chen

Analog Devices

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Kuang L. Yang

Analog Devices

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Timothy J. Brosnihan

Analog Devices

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Christine H. Tsau

Analog Devices

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John R. Martin

Analog Devices

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Xin Zhang

Analog Devices

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Craig E. Core

Analog Devices

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Jason W. Weigold

Analog Devices

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Bruce K. Wachtmann

Analog Devices

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Kieran P. Harney

Analog Devices

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