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Dive into the research topics where Christopher T. Lane is active.

Publication


Featured researches published by Christopher T. Lane.


Archive | 2007

Method and apparatus for processing a wafer

Steven Verhaverbeke; J. Kelly Truman; Christopher T. Lane; Sasson Somekh


Archive | 2002

Toroidal plasma source for plasma processing

Michael S. Cox; Canfeng Lai; Robert B. Majewski; David Wanamaker; Christopher T. Lane; Peter K. Loewenhardt; Shamouil Shamouilian; John Parks


Archive | 2000

Load-lock with external staging area

Kevin Fairbairn; Howard T. Grunes; Christopher T. Lane; Kelly A. Colborne


Archive | 2002

Methods and apparatus for stripping

Mark N. Kawaguchi; Elizabeth G. Pavel; James S. Papanu; Jonathan D. Mohn; John M. Yamartino; Christopher T. Lane; Michael Barnes; Robert Wunar


Archive | 2013

ADVANCED PLATFORM FOR PASSIVATING CRYSTALLINE SILICON SOLAR CELLS

Hari Ponnekanti; Alexander S. Polyak; James L'heureux; Michael S. Cox; Christopher T. Lane; Edward P. Hammond; Hemant P. Mungekar; Susanne Schlaefer; Wolfgang Buschbeck; Juergen Henrich; Andreas Lopp


Archive | 2014

Laser ablation platform for solar cells

Rohit Dey; Jeffrey L. Franklin; Giridhar Basappa; Marulasiddeswara Karisiddappa; Penchala N. Kankanala; Christopher T. Lane; James M. Gee


Archive | 2013

LOAD LOCK CHAMBER DESIGNS FOR HIGH-THROUGHPUT PROCESSING SYSTEM

Alexander S. Polyak; James L'heureux; Christopher T. Lane; Susanne Schlaefer; Juergen Henrich; Josef Thomas Hoog; Calvin R. Augason


Archive | 2009

SUBSTRATE CARRYING AND PROCESSING APPARATUS AND METHOD

Michael Barnes; Terry Bluck; Kevin P. Fairbairn; Christopher T. Lane; マイケル エス. バーンズ; ケヴィン ピー. フェアベアーン; テリー ブルック; クリストファー ティー. レーン


Archive | 2015

In-line chamber coating to control particle flaking

Iv Edward P. Hammond; Damanjot Kaur Kochhar; Michael P. Stewart; Tsutomu Tanaka; Hari Ponnekanti; Christopher T. Lane; Ruiping Wang


Archive | 2014

Loadlock conveyor wafer holder design

James L'heureux; Alexander S. Polyak; Yongsheng Liu; Christopher T. Lane; Hari Ponnekanti; Shengde Zhong

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