Christyves Chevallier

Mid-infrared sub-wavelength grating mirror design: tolerance and influence of technological constraints

High polarization selective Si/SiO2 mid-infrared sub-wavelength grating mirrors with large bandwidth adapted to VCSEL integration are compared. These mirrors have been automatically designed for operation at λ = 2.3 µm by an optimization algorithm which maximizes a specially defined quality factor. Several technological constraints in relation with the grating manufacturing process have been imposed within the optimization algorithm and their impact on the optical properties of the mirror have been evaluated. Furthermore, through the tolerance computation of the different dimensions of the structure, the robustness with respect to fabrication errors has been tested. Finally, it appears that the increase of the optical performances of the mirror imposes a less tolerant design with severer technological constraints resulting in a more stringent control of the manufacturing process.

Robust Design by Antioptimization for Parameter Tolerant GaAs/AlOx High Contrast Grating Mirror for VCSEL Application

A GaAs/AlOx high contrast grating structure design which exhibits a 99.5% high reflectivity for a 425 nm large bandwidth is reported. The high contrast grating (HCG) structure has been designed in order to enhance the properties of mid-infrared VCSEL devices by replacing the top Bragg mirror of the cavity. A robust optimization algorithm has been implemented to design the HCG structure not only as an efficient mirror but also as a robust structure against the imperfections of fabrication. The design method presented here can be easily adapted for other HCG applications at different wavelengths.

Parameter-tolerant design of high contrast gratings

This work is devoted to the design of high contrast grating mirrors taking into account the technological constraints and tolerance of fabrication. First, a global optimization algorithm has been combined to a numerical analysis of grating structures (RCWA) to automatically design HCG mirrors. Then, the tolerances of the grating dimensions have been precisely studied to develop a robust optimization algorithm with which high contrast gratings, exhibiting not only a high efficiency but also large tolerance values, could be designed. Finally, several structures integrating previously designed HCGs has been simulated to validate and illustrate the interest of such gratings.

GaAs/AlOx high-contrast grating mirrors for mid-infrared VCSELs

Mid-infrared Vertical cavity surface emitting lasers (MIR-VCSEL) are very attractive compact sources for spectroscopic measurements above 2μm, relevant for molecules sensing in various application domains. A long-standing issue for long wavelength VCSEL is the large structure thickness affecting the laser properties, added for the MIR to the tricky technological implementation of the antimonide alloys system. In this paper, we propose a new geometry for MIR-VCSEL including both a lateral confinement by an oxide aperture, and a high-contrast sub-wavelength grating mirror (HCG mirror) formed by the high contrast combination AIOx/GaAs in place of GaSb/A│AsSb top Bragg reflector. In addition to drastically simplifying the vertical stack, HCG mirror allows to control through its design the beam properties. The robust design of the HCG has been ensured by an original method of optimization based on particle swarm optimization algorithm combined with an anti-optimization one, thus allowing large error tolerance for the nano-fabrication. Oxide-based electro-optical confinement has been adapted to mid-infrared lasers, byusing a metamorphic approach with (Al) GaAs layer directly epitaxially grown on the GaSb-based VCSEL bottom structure. This approach combines the advantages of the will-controlled oxidation of AlAs layer and the efficient gain media of Sb-based for mid-infrared emission. We finally present the results obtained on electrically pumped mid-IR-VCSELs structures, for which we included oxide aperturing for lateral confinement and HCG as high reflectivity output mirrors, both based on AlxOy/GaAs heterostructures.

Technologies of oxide confinement and high contrast grating mirrors for mid-infrared VCSELs

A new architecture for mid-infrared (MIR) Vertical Cavity Surface Emitting Laser (VCSEL) is proposed and fabricated. The MIR-VCSEL structure includes both a lateral confinement by an oxide aperture, and a high-contrast sub-wavelength grating mirror (HCG mirror) formed by the high contrast combination AlOx/GaAs, and that replaces conventional GaSb/AlAsSb top Bragg mirror. Upon the GaSb-based half-microcavity bottom part, a metamorphic AlGaAs heterostructure was epitaxially grown to enable thermal oxidation and grating mirror fabrication steps on AlGaAs material platform. The optical design of the VCSEL structure and more precisely the HCG mirror has been optimized thanks to an original methodology based on optimization and anti-optimization methods, resulting in improved parameter tolerances regarding processing errors. After all, we show the complete fabrication of an electrically-pumped MIR monolithic VCSEL structure by integrating this new technological bricks.

AlOx/GaAs high contrast grating mirrors for mid infrared VCSELs

High contrast gratings (HCG) have drained recently highly attractive perspectives for VCSEL devices through the wide potentialities for obtaining unique optical properties with these integrable optical elements [1], in contrast to conventional Bragg reflectors. Since most of the HCG approaches on III-V based photonic devices are based on semiconductor/air-gap structures, strong limitations are foreseen for the integration in practical lasers. We proposed to exploit the high refractive index contrast available in the AlOx/GaAs system for which the oxide is formed with the mature thermal wet oxidation technique [2]. High reflective and polarization selective mirrors can thus been achieved monolithically by means of a VCSEL compatible process technology, in a wide spectral range from near to mid infrared [3]. Jointly, the AlOx lateral confinement scheme is proposed for implementation in mid infrared emitters [4]. We present in this paper the fabrication and performances of AlOx/GaAs HCG operating between 2.3 and 2.6 μm and their integration within oxide-confined mid-infrared electrically pumped VCSELs.

Robust design of subwavelength grating mirror for mid-infrared VCSEL application

We present the design of a Si/Si3N4 subwavelength grating mirror optimized for an integration in mid-infrared VCSEL. The definition of a quality factor adapted to VCSEL requirements and maximized by an optimization algorithm allowed us to obtain a polarization selective and high reflectivity structure. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances.

Optimized GaAs High Contrast Grating Design and Fabrication for Mid-infrared Application at 2.3 µm

A tolerant GaAs HCG design has been optimized for a mid-IR VCSEL application through the use of an optimization algorithm. Reflection spectra of an experimental grating are in a correct agreement with the simulations.