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Chun-Hon Chen

TSMC

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Publication

Featured researches published by Chun-Hon Chen.

Archive | 2000

Copper process compatible CMOS metal-insulator-metal capacitor structure and its process flow

Ssu-Pin Ma; Chun-Hon Chen; Ta-Hsun Yeh; Kuo-Reay Peng; Heng-Ming Hsu; Kong-Beng Thei; Chi-Wu Chou; Yen-Shih Ho

Archive | 2001

Copper MIM structure and process for mixed-signal and Rf capacitors and inductors

Ssu-Pin Ma; Chun-Hon Chen; Ta-Hsun Yeh; Kuo-Reay Peng; Heng-Ming Hsu; Kong-Beng Thei; Chi-Wu Chou; Yen-Shih Ho

Archive | 2003

High density MIM capacitor structure and fabrication process

Kuan-Lun Chang; Chuan-Ying Lee; Chun-Hon Chen

Archive | 2005

Method to fabricate high reliable metal capacitor within copper back-end process

Chi-Feng Huang; Chun-Hon Chen; Shy Chy Wong; Chih Hsien Lin

Archive | 2001

Dual damascene interconnect structures that include radio frequency capacitors and inductors

Ssu-Pin Ma; Chun-Hon Chen; Ta-Hsun Yeh; Kuo-Reay Peng; Heng-Ming Hsu; Kong-Beng Thei; Chi-Wu Chou; Yen-Shih Ho

Archive | 2003

Metal-over-metal devices and the method for manufacturing same

Chung-Long Chang; Chun-Hon Chen

Archive | 2002

Microelectronic fabrication having sidewall passivated microelectronic capacitor structure fabricated therein

Chi-Feng Huang; Shyh-Chyi Wang; Chih-Hsien Lin; Chun-Hon Chen; Tien-I Bao; Syun-Ming Jang

Archive | 2003

Compact capacitor structure having high unit capacitance

Chung Long Chang; Chun-Hon Chen

Archive | 2002

Microelectronic fabrication having microelectronic capacitor structure fabricated therein

Chi-Feng Huang; Chun-Hon Chen

Archive | 1999

Method of making a metal-insulator-metal capacitor in the CMOS process

Yen-Shih Ho; Jau-Yuann Chung; Chun-Hon Chen; Hun-Jan Tao

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Yen-Shih Ho

TSMC

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Heng-Ming Hsu

National Chung Hsing University

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Kong-Beng Thei

TSMC

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Kuo-Reay Peng

TSMC

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Ssu-Pin Ma

TSMC

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Ta-Hsun Yeh

TSMC

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Chi-Wu Chou

TSMC

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Chi-Feng Huang

TSMC

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Chung-Long Chang

TSMC

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Jau-Yuann Chung

TSMC

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