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Claude Rousseau

Alcatel-Lucent

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Publication

Featured researches published by Claude Rousseau.

Archive | 2000

System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same

Claude Rousseau; Patrick Pilotti; Philippe Maquin

Archive | 2004

Controlling pressure in a process chamber by variying pump speed and a regulator valve, and by injecting inert gas

Roland Bernard; Jean-Pierre Desbiolles; Sebastien Munari; Claude Rousseau

Archive | 2000

Pressure control system for a vacuum chamber, vacuum pumping unit provided with such a system

Philippe Maquin; Patrick Pilotti; Claude Rousseau

Archive | 2004

Control system for process chamber pressure based on pump speed, valve opening and neutral gas injection

Roland Bernard; Jean-Pierre Desbiolles; Sebastien Munari; Claude Rousseau

Archive | 2010

SYSTEM FOR REGULATING PRESSURE IN VACUUM CHAMBER, AND VACUUM PUMPING UNIT EQUIPPED WITH THE SAME

Philippe Maquin; Patrick Pilotti; Claude Rousseau; クロード・ルソー; パトリツク・ピロツテイ; フイリツプ・マカン

Archive | 2004

Pressure control system for process chamber based on the pump speed, the valve opening and neutral gas injection

Roland Bernard; Jean-Pierre Desbiolles; Sebastien Munari; Claude Rousseau

Archive | 2004

Druckregelungssystem für Prozesskammer auf der Basis der Pumpengeschwindigkeit, der Ventilöffnung und Neutralgasinjektion A pressure regulating system for the process chamber on the basis of pump speed, the valve opening and neutral gas injection

Roland Bernard; Jean-Pierre Desbiolles; Sebastien Munari; Claude Rousseau

Archive | 2003

Pressure control processes in the chamber pump speed control, regulation valve and inert gas injection

Roland Bernard; Jean Pierre Desbiolles; Sebastien Munari; Claude Rousseau

Archive | 2000

Druckregelvorrichtung für eine Vakuumkammer, und eine mit einer solchen Vorrichtung versehenen Vakuumpumpeinheit

Claude Rousseau; Patrick Pilotti; Philippe Maquin

Archive | 2000

Système de régulation de pression d'une enceinte sous vide, groupe de pompage à vide pourvu d'un tel système

Philippe Maquin; Patrick Pilotti; Claude Rousseau

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Collaboration

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Patrick Pilotti

Alcatel-Lucent

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Philippe Maquin

Alcatel-Lucent

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Roland Bernard

Alcatel-Lucent

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Sebastien Munari

Alcatel-Lucent

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Jean-Pierre Desbiolles

Alcatel-Lucent

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