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Jean-Pierre Desbiolles

Alcatel-Lucent

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Publication

Featured researches published by Jean-Pierre Desbiolles.

Archive | 2010

Controlling gas partial pressures for process optimization

Jean-Pierre Desbiolles; Michel Puech

Archive | 2006

Method and device for monitoring the contamination of substrate wafers

Arnaud Favre; Rémi Thollot; Xavier Metais; Jean-Pierre Desbiolles

Archive | 2005

Vacuum interface between a mini-environment pod and a piece of equipment

Catherine Le Guet; Jean-Pierre Desbiolles; Hisanori Kambara; Erwan Godot; Raphaël Sylvestre

Archive | 2004

Controlling pressure in a process chamber by variying pump speed and a regulator valve, and by injecting inert gas

Roland Bernard; Jean-Pierre Desbiolles; Sebastien Munari; Claude Rousseau

Archive | 2006

Method and device for controlling the contamination of wafer substrates

Arnaud Favre; Rémi Thollot; Xavier Metais; Jean-Pierre Desbiolles

Archive | 2005

Vacuum interface between mini-environment pod and apparatus

Jean-Pierre Desbiolles; Hisanori Kambara; Guet Catherine Le; カテリーヌ・ル・ゲ; ジヤン−ピエール・デスビオル; 久徳 神原

Archive | 2004

Molecular drag, turbomolecular, or hybrid pump with an integrated valve

Jean-Pierre Desbiolles

Archive | 2005

Detecting minority gaseous species by light-emission spectroscopy

Gloria Sogan; Julien Bounouar; Jean-Pierre Desbiolles; Isabelle Gaurand

Archive | 2004

Control system for process chamber pressure based on pump speed, valve opening and neutral gas injection

Roland Bernard; Jean-Pierre Desbiolles; Sebastien Munari; Claude Rousseau

Archive | 2005

Detecting gaseous species by light-emission spectrometry with spectrum processing

Gloria Sogan; Julien Bounouar; Jean-Pierre Desbiolles; Isabelle Gaurand

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Collaboration

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Gloria Sogan

Alcatel-Lucent

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Isabelle Gaurand

Alcatel-Lucent

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Julien Bounouar

Alcatel-Lucent

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Sebastien Munari

Alcatel-Lucent

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Michel Puech

Alcatel-Lucent

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Claude Rousseau

Alcatel-Lucent

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Hisanori Kambara

Alcatel-Lucent

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Roland Bernard

Alcatel-Lucent

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Erwan Godot

Alcatel-Lucent

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Guet Catherine Le

Alcatel-Lucent

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