Craig A. Bercaw

Patterned susceptor to reduce electrostatic force in a CVD chamber

Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces

Corrosion-resistant aluminum article for semiconductor processing equipment

Method of forming a corrosion-resistant protective coating on aluminum substrate

Slotted conical spring washer

Patterned susceptor to reduce electrostatic force

Method of filling pores in anodized aluminum parts

Corrosion-resistant protective coating on aluminum substrate or surface and method of forming same

Corrosion-resistant protective coating on aluminum substrate and method of forming same

Heat exchanger apparatus for a semiconductor wafer support and method of fabricating same