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Fred C. Redeker

Lam Research

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Publication

Featured researches published by Fred C. Redeker.

Archive | 2004

Apparatus and method for providing a confined liquid for immersion lithography

David Hemker; Fred C. Redeker; John M. Boyd; John M. de Larios; Michael Ravkin; Mikhail Korolik

Archive | 2003

Methods and systems for processing a substrate using a dynamic liquid meniscus

James P. Garcia; John M. de Larios; Michael Ravkin; Fred C. Redeker; Carl Woods

Archive | 2003

Apparatus and method for depositing and planarizing thin films of semiconductor wafers

Mike Ravkin; John M. Boyd; Yezdi Dordi; Fred C. Redeker; John M. de Larios

Archive | 2003

Method and apparatus for cleaning a substrate using megasonic power

John M. Boyd; Mike Ravkin; Fred C. Redeker; John M. de Larios

Archive | 2003

Proximity brush unit apparatus and method

John M. Boyd; Michael L. Orbock; Fred C. Redeker

Archive | 2003

Vertical proximity processor

James P. Garcia; Mike Ravkin; Carl Woods; Fred C. Redeker; John M. de Larios

Archive | 2004

System and method for integrating in-situ metrology within a wafer process

John M. Boyd; John M. de Larios; Michael Ravkin; Fred C. Redeker

Archive | 2007

Method and apparatus for semiconductor wafer cleaning using high-frequency acoustic energy with supercritical fluid

Fred C. Redeker; John M. Boyd; John Parks

Archive | 2005

System and method for modulating flow through multiple ports in a proximity head

James P. Garcia; Fred C. Redeker; John M. de Larios

Archive | 2006

Method for removing contamination from a substrate and for making a cleaning solution

Erik M. Freer; John M. de Larios; Katrina Mikhaylichenko; Michael Ravkin; Mikhail Korolik; Fred C. Redeker

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Collaboration

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John M. Boyd

Lam Research

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Michael Ravkin

Lam Research

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John M. de Larios

Lam Research

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Mikhail Korolik

Lam Research

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Carl Woods

Lam Research

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Larios John M. De

Lam Research

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Mike Ravkin

Lam Research

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Yezdi Dordi

Lam Research

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James P. Garcia

Lam Research

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Erik M. Freer

Lam Research

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