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Dive into the research topics where D. Jucius is active.

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Featured researches published by D. Jucius.


Smart Optical Inorganic Structures and Devices | 2001

alpha-C:H films for photonic structure fabrication

V. Kopustinskas; Viktoras Grigaliunas; D. Jucius; Sarunas Meskinis; Mindaugas Margelevičius; Rolandas Tomasiunas

(alpha) -C:H films were applied to fabricate photonic band gap (PBG) structures in the silicon substrate by SF6N2-based reactive ion etching (RIE). The influence of RIE parameters on (alpha) C:H films structure and etching rate was investigated int his study. It is shown that RIE rate for (alpha) -C:H films changes from 26 nm/min to 38 nm/min with the integrated intensity ratios ID/IG varied from 0.65 to 1.1. It is evident that increase in etching rate is determined by increasing quantity of sp2 bonding in the synthesized (alpha) -C:H films. RIE does not change structure of the (alpha) -C:H masking films. However, non- uniform character of RIE takes place due to the non- homogeneous graphite clusters in (alpha) -C:H masking films. However, non-uniform character of RIE takes place due to the non-homogeneous graphite clusters in (alpha) -C:H masking films. By changing parameters of silicon etching, such as RF power density, pressure and negative bias voltage, anisotropy was varied in wide range and microstructures of different shape were obtained.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.


Applied Surface Science | 2012

Wettability and optical properties of O2 and CF4 plasma treated biaxially oriented semicrystalline poly(ethylene terephthalate) films

D. Jucius; V. Grigaliūnas; V. Kopustinskas; Algirdas Lazauskas; A. Guobienė


Applied Surface Science | 2011

Hot embossing of PTFE: Towards superhydrophobic surfaces

D. Jucius; V. Grigaliūnas; M. Mikolajūnas; A. Guobienė; V. Kopustinskas; A. Gudonytė; Pranas Narmontas


Applied Surface Science | 2010

Surface texturing of polytetrafluoroethylene by hot embossing

D. Jucius; A. Guobienė; V. Grigaliūnas


Thin Solid Films | 2004

Laser pulse assisted nanoimprint lithography

V. Grigaliūnas; Sigitas Tamulevičius; R. Tomašiūnas; V. Kopustinskas; A. Guobien; D. Jucius


Applied Surface Science | 2005

Optically variable imaging using nanoimprint technique

V. Grigaliūnas; D. Jucius; Sigitas Tamulevičius; A. Guobienė; V. Kopustinskas


Applied Surface Science | 2006

Nanoimprint lithography using IR laser irradiation

V. Grigaliūnas; Sigitas Tamulevičius; M. Muehlberger; D. Jucius; A. Guobienė; V. Kopustinskas; A. Gudonytė


Microelectronic Engineering | 2004

Rapid evaluation of imprint quality using optical scatterometry

D. Jucius; Viktoras Grigaliunas; A. Guobiene


Applied Surface Science | 2015

Highly hydrophilic poly(ethylene terephthalate) films prepared by combined hot embossing and plasma treatment techniques

D. Jucius; V. Kopustinskas; V. Grigaliūnas; A. Guobienė; Algirdas Lazauskas; M. Andrulevičius


Microelectronic Engineering | 2016

Microlens fabrication by 3D electron beam lithography combined with thermal reflow technique

V. Grigaliūnas; Algirdas Lazauskas; D. Jucius; Darius Viržonis; Brigita Abakeviciene; Saulius Smetona; Sigitas Tamulevičius

Collaboration


Dive into the D. Jucius's collaboration.

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V. Grigaliūnas

Kaunas University of Technology

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V. Kopustinskas

Kaunas University of Technology

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A. Guobienė

Kaunas University of Technology

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Algirdas Lazauskas

Kaunas University of Technology

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Sigitas Tamulevičius

Kaunas University of Technology

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Viktoras Grigaliunas

Kaunas University of Technology

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A. Gudonytė

Kaunas University of Technology

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Brigita Abakevičienė

Kaunas University of Technology

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M. Andrulevičius

Kaunas University of Technology

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Mindaugas Margelevičius

Kaunas University of Technology

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