D. Jucius
Kaunas University of Technology
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Publication
Featured researches published by D. Jucius.
Smart Optical Inorganic Structures and Devices | 2001
V. Kopustinskas; Viktoras Grigaliunas; D. Jucius; Sarunas Meskinis; Mindaugas Margelevičius; Rolandas Tomasiunas
(alpha) -C:H films were applied to fabricate photonic band gap (PBG) structures in the silicon substrate by SF6N2-based reactive ion etching (RIE). The influence of RIE parameters on (alpha) C:H films structure and etching rate was investigated int his study. It is shown that RIE rate for (alpha) -C:H films changes from 26 nm/min to 38 nm/min with the integrated intensity ratios ID/IG varied from 0.65 to 1.1. It is evident that increase in etching rate is determined by increasing quantity of sp2 bonding in the synthesized (alpha) -C:H films. RIE does not change structure of the (alpha) -C:H masking films. However, non- uniform character of RIE takes place due to the non- homogeneous graphite clusters in (alpha) -C:H masking films. However, non-uniform character of RIE takes place due to the non-homogeneous graphite clusters in (alpha) -C:H masking films. By changing parameters of silicon etching, such as RF power density, pressure and negative bias voltage, anisotropy was varied in wide range and microstructures of different shape were obtained.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Applied Surface Science | 2012
D. Jucius; V. Grigaliūnas; V. Kopustinskas; Algirdas Lazauskas; A. Guobienė
Applied Surface Science | 2011
D. Jucius; V. Grigaliūnas; M. Mikolajūnas; A. Guobienė; V. Kopustinskas; A. Gudonytė; Pranas Narmontas
Applied Surface Science | 2010
D. Jucius; A. Guobienė; V. Grigaliūnas
Thin Solid Films | 2004
V. Grigaliūnas; Sigitas Tamulevičius; R. Tomašiūnas; V. Kopustinskas; A. Guobien; D. Jucius
Applied Surface Science | 2005
V. Grigaliūnas; D. Jucius; Sigitas Tamulevičius; A. Guobienė; V. Kopustinskas
Applied Surface Science | 2006
V. Grigaliūnas; Sigitas Tamulevičius; M. Muehlberger; D. Jucius; A. Guobienė; V. Kopustinskas; A. Gudonytė
Microelectronic Engineering | 2004
D. Jucius; Viktoras Grigaliunas; A. Guobiene
Applied Surface Science | 2015
D. Jucius; V. Kopustinskas; V. Grigaliūnas; A. Guobienė; Algirdas Lazauskas; M. Andrulevičius
Microelectronic Engineering | 2016
V. Grigaliūnas; Algirdas Lazauskas; D. Jucius; Darius Viržonis; Brigita Abakeviciene; Saulius Smetona; Sigitas Tamulevičius