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Dive into the research topics where M. Andrulevičius is active.

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Featured researches published by M. Andrulevičius.


Metrology, inspection, and process control for microlithography. Conference | 2005

Optical characterization of diffractive optical elements replicated in polymers

Sigitas Tamulevičius; Giedrius Janusas; Asta Guobiene; Arvydas Palevicius; Vytautas Ostasevicius; M. Andrulevičius

Due to relative ease and cost effectiveness with which planar polymeric structures can be fabricated, diffractive optical elements replication in polymeric substrates are receiving global attention for a myriad of planar photonic and optoelectronic applications including optical interconnects. In this work we present an optical laser control method to control replication of microperiodic profile structures in polymers. Diffraction efficiency of diffraction gratings (originally produced in silicon, quartz glass and in replicated polymer substrates) was measured experimentally and estimated using linear dimensions of gratings or replica defined by atomic force microscopy (AFM). Diffraction efficiency of periodic structure was used to control the surface relief formation during the combined ion etching of crystalline Si (100) and replication of this structure using UV light hardening and hot embossing. The main experimental results are compared with the computer simulations where the standard programme (PCGrate-SX6.0) was employed.


Beilstein Journal of Nanotechnology | 2017

Nitrogen-doped twisted graphene grown on copper by atmospheric pressure CVD from a decane precursor

I. V. Komissarov; N. G. Kovalchuk; Vladimir Labunov; Ksenia V. Girel; Olga V. Korolik; M. S. Tivanov; Algirdas Lazauskas; M. Andrulevičius; Tomas Tamulevičius; V. Grigaliūnas; Sarunas Meskinis; Sigitas Tamulevičius; S. L. Prischepa

We present Raman studies of graphene films grown on copper foil by atmospheric pressure CVD with n-decane as a precursor, a mixture of nitrogen and hydrogen as the carrier gas, under different hydrogen flow rates. A novel approach for the processing of the Raman spectroscopy data was employed. It was found that in particular cases, the various parameters of the Raman spectra can be assigned to fractions of the films with different thicknesses. In particular, such quantities as the full width at half maximum of the 2D peak and the position of the 2D graphene band were successfully applied for the elaborated approach. Both the G- and 2D-band positions of single layer fractions were blue-shifted, which could be associated with the nitrogen doping of studied films. The XPS study revealed the characteristics of incorporated nitrogen, which was found to have a binding energy around 402 eV. Moreover, based on the statistical analysis of spectral parameters and the observation of a G-resonance, the twisted nature of the double-layer fraction of graphene grown with a lower hydrogen feeding rate was demonstrated. The impact of the varied hydrogen flow rate on the structural properties of graphene and the nitrogen concentration is also discussed.


Nanophotonics | 2008

Periodic structures modified with silver nanoparticles for novel plasmonic application

Asta Šileikaitčė; Tomas Tamulevičius; Sigitas Tamulevičius; M. Andrulevičius; J. Puišo; Asta Guobienčė; Igoris Prosyčevas; Morten Madsen; Christian Maibohm; Horst-Günter Rubahn

Forming structures similar to or smaller than the optical wavelength offers a wide range of possibilities to modify the optical properties of materials. Tunable optical nanostructures can be applied as materials for surface-enhanced spectroscopy, optical filters, plasmonic devices, and sensors. In this work we present experimental results on technology and properties of periodical, polymer based optical structures modified by ordered adsorption of silver nanoparticles. These structures were formed combining UV hardening and dip coating from colloidal solutions. We have investigated the influence of silver nanoparticles assembly on the ambient conditions (deposition temperature and time) and surface features (periodicities and shape) of the template micro structures. Optical absorbance as well as morphology of the structures containing silver nanoparticles were investigated by UV-VIS spectroscopy, AFM, SEM and optical microscopy. The influence of silver nanoparticles on the optical properties of the structures was investigated by polarized light spectroscopy (Grating Light Reflection Spectroscopy - GLRS). From the results of this study we propose a low cost procedure for fabricating structures that could be potentially new type of plasmonic sensors exploiting surface enhanced plasmon resonance in silver nano structures.


Materials Science and Engineering B-advanced Functional Solid-state Materials | 1996

A simple model of radiation swelling of silicon

Sigitas Tamulevičius; I. Poéla; M. Andrulevičius

Abstract The radiation swelling of silicon is explained as a diffusion-like process where the flux of interstitials out of the plane is defined by the gradient of the concentration of interstitials and the gradient of mechanical stresses in the ion-implanted region of the solid. This model was applied to describe the dynamics and the main regularities (dependence of strain on the ion flux density, ion energy, substrate temperature) of ion implanted silicon (Ni + , E = 40–160 keV, j = 5–180 μA cm −2 ). It is demonstrated that suppression of radiation swelling at high temperatures of the substrate or high ion beam current density can be explained by the annihilation of radiation defects.


ACS Applied Materials & Interfaces | 2018

Giant Negative Piezoresistive Effect in Diamond-like Carbon and Diamond-like Carbon-Based Nickel Nanocomposite Films Deposited by Reactive Magnetron Sputtering of Ni Target

Šaru̅nas Meškinis; Rimantas Gudaitis; K. Šlapikas; Andrius Vasiliauskas; Arvydas Čiegis; Tomas Tamulevičius; M. Andrulevičius; Sigitas Tamulevičius

Piezoresistive properties of hydrogenated diamond-like carbon (DLC) and DLC-based nickel nanocomposite (DLC:Ni) films were studied in the range of low concentration of nickel nanoparticles. The films were deposited by reactive high power pulsed magnetron sputtering (HIPIMS) of Ni target, and some samples were deposited by direct current (dc) reactive magnetron sputtering for comparison purposes. Raman scattering spectroscopy, energy-dispersive X-ray spectrometry (EDS), and X-ray photoelectron spectroscopy (XPS) were used to study the structure and chemical composition of the films. A four-point bending test was applied to study piezoresistive properties of the films. For some samples containing less than 4 at. % Ni and for the samples containing no Ni (as defined by both EDS and XPS), a giant negative piezoresistive effect was observed. The giant negative piezoresistive effect in DLC films deposited by either reactive HIPIMS or dc magnetron sputtering of Ni target was explained by possible clustering of the sp2-bonded carbon and/or formation of areas with the decreased hydrogen content. It was suggested that the tensile stress-induced rearrangements of these conglomerations have resulted in the increased conductivity paths.


Nanostructured Thin Films X | 2017

Advanced design of UV waveplates based on nano-structured thin films

Lina Grineviciute; Tomas Tolenis; Rytis Buzelis; M. Andrulevičius; Algirdas Lazauskas; Algirdas Selskis; Ramutis Drazdys

Optical elements for polarization control are one of the main parts in advanced laser systems. The state and intensity of polarized light is typically controlled by optical elements, namely waveplates. Polymers, solid or liquid crystals and other materials with anisotropic refractive index can be used for production of waveplates. Unfortunately, most of aforementioned materials are fragile, unstable when environmental conditions changes, difficult to apply in microsystems and has low resistance to laser radiation. Retarders, fabricated by evaporation process, do not consist any of these drawbacks. In order to manufacture such optical components with high quality, characterisation of deposition parameters are essential. A serial bi-deposition method was employed to coat anisotropic layers for polarisation control. Such waveplate can be deposited on micro optics or other optical elements, essentially improving compact optical systems. The range of available materials is limited by absorption losses for waveplates in UV spectral region. Therefore, the investigation was accomplished with four eligible candidates – TiO2, LaF3, Al2O3 and SiO2. Structural (XPS, XRD) and optical (spectrophotometry, ellipsometry) analysis have shown Al2O3 and SiO2 as the most applicable materials for UV spectral region.


european quantum electronics conference | 2009

Diffraction manipulated resonators with intracavity photonic crystals

M. Peckus; R. Rogalskis; M. Andrulevičius; Tomas Tamulevičius; A. Guobiene; Valdas Sirutkaitis; Kestutis Staliunas

Photonic crystals (PCs), the materials with periodic in space refraction index, is an object of intensive study since their proposal in 1987. The studies were focused initially on the temporal dispersion characteristics of the PCs. The dispersion curves were found to modify substantially due to the periodic modulation of the index, and to display a band structure. More recently it was found that the spatial dispersion (diffraction) characteristics also modify substantially in periodic materials: the diffraction can become negative, or can vanish to zero [1, 2], resulting in the so-called self-collimation effect in the latter case.


Archive | 2009

Features of Polytetrafluoroethylene Coating Growth on Activated Surfaces from Gas Phase

Alexander A. Rogachev; Sigitas Tamulevičius; Alexander V. Rogachev; Igoris Prosyčevas; M. Andrulevičius

The kinetics and morphological peculiarities of polytetrafluoroethylene (PTFE) coating growth from the active gas phase on differently treated substrates by solvent, N+ or Ar+ ions are considered. Wettability of thin films was tested using water and glycerin liquids for contact angle measurements, furthermore surface energy was also calculated. Chemical composition of the deposited thin polymeric films was analyzed by X-ray photoelectron spectroscopy (XPS), film morphology was studied by atomic force microscopy (AFM). An additional mathematical analysis of the cluster formation images was carried out. It was found that the substrate surface energy effects on the distribution of polymer microparticles both at the initial stage as well as during coating growth. The substrate surface activation by ion beam results formation of a continuous low-molecular coating with a thinner apparent thickness.


Surface & Coatings Technology | 2006

Synthesis of the silicon and silicon oxide doped a-C:H films from hexamethyldisiloxane vapor by DC ion beam

V. Kopustinskas; Šarūnas Meškinis; Sigitas Tamulevičius; M. Andrulevičius; B. Čižiūte.; G. Niaura


Applied Surface Science | 2005

XPS study of the ultrathin a-C:H films deposited onto ion beam nitrided AISI 316 steel

Šarūnas Meškinis; M. Andrulevičius; V. Kopustinskas; Sigitas Tamulevičius

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Sigitas Tamulevičius

Kaunas University of Technology

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Šarūnas Meškinis

Kaunas University of Technology

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Tomas Tamulevičius

Kaunas University of Technology

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A. Guobienė

Kaunas University of Technology

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Algirdas Lazauskas

Kaunas University of Technology

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K. Šlapikas

Kaunas University of Technology

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V. Kopustinskas

Kaunas University of Technology

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R. Gudaitis

Kaunas University of Technology

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Andrius Vasiliauskas

Kaunas University of Technology

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V. Grigaliūnas

Kaunas University of Technology

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