D. Weiland

Simultaneous determination of the Young's modulus and Poisson's ratio in micro/nano materials

Most mechanical properties of micro/nano materials cannot be determined using purely theoretical approaches or by extrapolation from bulk measurements. These properties are usually extracted experimentally by using micromechanical test structures such as cantilevers. This paper reports a novel cross-shaped structure used to simultaneously extract the Youngs modulus and Poissons ratio using the force–deflection principle. Equations for calculating the Youngs modulus and Poissons ratio are derived, and using these, an experimental demonstration of this method is presented. The average values of the Youngs modulus and Poissons ratio for the device layer commercially sourced silicon on a silicon-on-insulator (SOI) wafer are measured to be 116.5 ± 2.24 GPa and 0.32 ± 0.03, respectively.

Submicron alignment of a two-dimensional array of multiple single-mode fibers

This letter presents a patented method to align single- or multimode optical fibers on top of an optoelectronic emitter array. Electrostatic forces are used to align copper-coated optical fibers within adhesive filled holes. The manufacturing and alignment performance of a microholder with a hole diameter of 1000 /spl mu/m are fully characterized. The outer diameter of the optical single-mode fiber is 125 /spl mu/m including the cladding. A submicron alignment accuracy can be inferred from the measurements taken. The sensitivity of the alignment procedure has been found to be between 0.25 and 1 /spl mu/m per volt depending on the clamping distance. The combination of the electrostatic movement and the optical monitoring of the fiber position in a closed-loop feedback system yield a highly accurate and sensitive active alignment system.

Low-cost active-alignment of single-mode fiber-arrays

A low-cost method for the active alignment of 2D bundles of optical single mode fibres is described in this article. Submicron translational alignment accuracy is being implemented by this method. High positioning accuracy can be realised by combining electrostatic movement and monitoring of the insertion losses in a closed loop feedback alignment system.

Adaptive Packaging Solution for a Microlens Array Placed over a Micro-UV-LED Array

A packaging solution has been developed to accurately align a microlens array over a micro-UV-LED array. The novel method provides static as well as dynamic alignment capabilities, the latter allowing the microlens array to be moved in vertical and lateral direction.

Manufacture of two-dimensional monomode optical fiber array using MEMS technology

A method to manufacture 2D bundles of optical single mode fibres has been developed and demonstrated. The method is based on actively aligning metal coated fibres using electrostatic forces. We report the analytical modelling and simulation of the system using FEMLABreg

Optical fibre array manufacture using electrostatic actuation

A novel method to manufacture two-dimensional bundles of single mode optical fibres at sub-micron pitch accuracy is presented. An array of holes, each surrounded by four electrodes has been produced using the UV-LIGA process. Electrostatic fields between the electrodes and a metal coated optical single mode fibre inserted into such a hole, are used to position the fibre. The position of the fibre core can be monitored and moved to its ideal position. Using thermal or UV activation a cement filling the hole around the fibre is cured to fix the fibre in place.

MicroLens/UV-LED array packaging for dynamic and static alignment

This paper presents a fully integrated packaging solution that permits the static and active alignment of a microLens array placed on top of a micro-UV-LED array. The entire process is manufactured by UV-lithography using predominantly the photoresists SU8 and THB. The processing temperature for all steps is below 120degC.

Microengineered Two-Dimensional Arrays of Monomode Optical Fibers

In this paper, a method to manufacture 2-D bundles of single-mode optical fibers of highly accurate pitch is presented. Electrostatic actuation of the metal-clad optical fibers is performed to align the fibers with submicrometer translational alignment accuracy. The manufacturing and alignment performance characteristics of the fiber holder are fully described. The sensitivity of the active-alignment procedure for a maximum displacement up to 90 mum is between 0.125 and 1.1 mum, depending on the clamping distance. An alignment accuracy of around 0.2 mum can be achieved with this alignment method. The combination of the electrostatic actuation with the optical monitoring of the fiber pitch in a closed-loop feedback system provides a highly accurate and sensitive alignment system.