Daishi Yokoyama
AZ Electronic Materials
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Publication
Featured researches published by Daishi Yokoyama.
Proceedings of SPIE, the International Society for Optical Engineering | 2008
Yuji Tashiro; Takeshi Sekito; Takafumi Iwata; Daishi Yokoyama; Toshiaki Nonaka
We succeeded in development of SOG materials comprised of cage-type phenyl silsesquioxanes (PSQ) and their alkali soluble derivatives. The alkali soluble silsesquioxane (APSQ) can provide both positive and negative tone photosensitive SOG combination with diazo naphtoquinone (DNQ) and photo-base (acid) agent, respectively. Here we present feature of photolithography process and film properties for our SOG materials.
Archive | 2014
Daishi Yokoyama; Takashi Fuke; Yuji Tashiro; Takashi Sekito; Toshiaki Nonaka
Archive | 2012
Takashi Sekito; Daishi Yokoyama; Takashi Fuke; Yuki Tashiro; Toshiaki Nonaka; Yasuaki Tanaka
Archive | 2013
Naofumi Yoshida; Yuji Tashiro; Daishi Yokoyama; Yasuaki Tanaka; Takashi Fuke; Megumi Takahashi; Toshiaki Nonaka
Archive | 2012
Takashi Sekito; Daishi Yokoyama; Takashi Fuke; Yuji Tashiro; Toshiaki Nonaka; Yasuaki Tanaka
Archive | 2013
Daishi Yokoyama; Atsuko Noya; Yuji Tashiro; Naofumi Yoshida; Yasuaki Tanaka; Takashi Fuke; Megumi Takahashi; Katsuto Taniguchi; Toshiaki Nonaka
Archive | 2017
Motoki Misumi; Daishi Yokoyama; Katsuto Taniguchi; Masahiro Kuzawa
Archive | 2017
Motoki Misumi; Daishi Yokoyama; Katsuto Taniguchi; Masahiro Kuzawa
Archive | 2016
伸武 野寺; Nobutake Nodera; 章宏 篠塚; Akihiro Shinozuka; 真司 小岩; Shinji Koiwa; 真裕 加藤; Masahiro Kato; 隆夫 松本; Takao Matsumoto; 崇司 福家; Takashi Fuke; 大志 横山; Daishi Yokoyama; 克人 谷口; Katsuto Taniguchi
Archive | 2015
Naofumi Yoshida; Yuji Tashiro; Daishi Yokoyama; Yasuaki Tanaka; Takashi Fuke; Megumi Takahashi; Toshiaki Nonaka
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