Yuji Tashiro
AZ Electronic Materials
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Publication
Featured researches published by Yuji Tashiro.
Journal of Inorganic and Organometallic Polymers and Materials | 1992
T. Isoda; H. Kaya; H. Nishii; O. Funayama; T. Suzuki; Yuji Tashiro
Preceramic perhydropolysilazane has been synthesized by the ammonolysis of dichlorosilane pyridine adduct. Perhydropolysilazane was polymerized and cross-linked by heat treatment with or without ammonia by dehydrogen condensation between SiH and NH and disproportionation at the SiH site in the polymers in the presence of pyridine. Ceramic yields of 82–93% were observed for perhydropolysilazane. The ceramic yield depended on the branching-group, i.e., −SiH < and −N<, content of the polymer. Controlled molecular weight distribution and elemental composition of the polymers obtained by heat treatment in the presence of pyridine meet various requirements for the production of shaped ceramics.
Proceedings of SPIE, the International Society for Optical Engineering | 2008
Yuji Tashiro; Takeshi Sekito; Takafumi Iwata; Daishi Yokoyama; Toshiaki Nonaka
We succeeded in development of SOG materials comprised of cage-type phenyl silsesquioxanes (PSQ) and their alkali soluble derivatives. The alkali soluble silsesquioxane (APSQ) can provide both positive and negative tone photosensitive SOG combination with diazo naphtoquinone (DNQ) and photo-base (acid) agent, respectively. Here we present feature of photolithography process and film properties for our SOG materials.
Journal of the American Ceramic Society | 1993
Osamu Funayama; Tomohiro Kato; Yuji Tashiro; Takeshi Isoda
Archive | 1998
Hideki Matsuo; Masahiro Kokubo; Takashi Ohbayashi; Yuji Tashiro; Tadashi Suzuki; Masami Kizaki; Haruo Hashimoto; Yasuo Shimizu; Takaaki Sakurai; Hiroyuki Aoki
Journal of The Ceramic Society of Japan | 1990
Osamu Funayama; Mikiro Arai; Yuji Tashiro; Hiroyuki Aoki; Tadashi Suzuki; Kozaburo Tamura; Hiroshi Kaya; Hayato Nishii; Takeshi Isoda
Archive | 2000
Tomoko Aoki; Yasuo Shimizu; Yuji Tashiro; 泰雄 清水; 祐治 田代; 倫子 青木
Archive | 1990
Masaaki Ichiyama; Takeshi Isoda; Isato Nishii; Koji Okuda; Yasuo Shimizu; Yuji Tashiro
Archive | 2014
Daishi Yokoyama; Takashi Fuke; Yuji Tashiro; Takashi Sekito; Toshiaki Nonaka
Archive | 2003
Yuji Tashiro
Archive | 1997
Tomoko Aoki; Toru Funayama; Yasuo Shimizu; Yuji Tashiro; Kazuhiro Yamada; 一博 山田; 泰雄 清水; 裕治 田代; 徹 舟山; 倫子 青木
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