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Daisuke Tazawa

Canon Inc.

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Publication

Featured researches published by Daisuke Tazawa.

Archive | 1989

IMAGE FORMING METHOD

Kazuyoshi Akiyama; Shigenori Ueda; Daisuke Tazawa; Tomohito Ozawa

Archive | 2011

Vacuum processing apparatus and vacuum processing method

Kazuyoshi Akiyama; Tatsuyuki Aoike; Toshiyasu Shirasuna; Hitoshi Murayama; Takashi Otsuka; Daisuke Tazawa; Kazuto Hosoi

Archive | 2004

Vacuum processing method, vacuum processing apparatus, semiconductor device manufacturing method and semiconductor device

Makoto Aoki; Toshiyasu Shirasuna; Hiroaki Niino; Kazuyoshi Akiyama; Hitoshi Murayama; Shinji Tsuchida; Daisuke Tazawa; Yukihiro Abe

Archive | 2001

Vacuum processing methods

Hitoshi Murayama; Tatsuyuki Aoike; Toshiyasu Shirasuna; Kazuyoshi Akiyama; Takashi Ohtsuka; Daisuke Tazawa; Kazuto Hosoi; Yukihiro Abe

Archive | 2001

Vacuum processing method and semiconductor device manufacturing method in which high-frequency powers having mutually different frequencies are applied to at least one electrode

Makoto Aoki; Toshiyasu Shirasuna; Hiroaki Niino; Kazuyoshi Akiyama; Hitoshi Murayama; Shinji Tsuchida; Daisuke Tazawa; Yukihiro Abe

Archive | 2004

Vacuum processing apparatus in which high frequency powers having mutually different frequencies are used to generate plasma for processing an article

Makoto Aoki; Toshiyasu Shirasuna; Hiroaki Niino; Kazuyoshi Akiyama; Hitoshi Murayama; Shinji Tsuchida; Daisuke Tazawa; Yukihiro Abe

Archive | 2001

Method and apparatus for vacuum processing, semiconductor device manufacturing method and semiconductor device

Yukihiro Abe; Kazuyoshi Akiyama; Makoto Aoki; Hitoshi Murayama; Hiroaki Niino; Toshiyasu Shirasuna; Daisuke Tazawa; Shinji Tsuchida

Archive | 2008

Plasma treatment method and plasma treatment apparatus

Toshiyasu Shirasuna; Tatsuyuki Aoike; Kazuyoshi Akiyama; Hitoshi Murayama; Takashi Otsuka; Daisuke Tazawa; Kazuto Hosoi; Yukihiro Abe

Archive | 2001

VACUUM TREATMENT METHOD AND VACUUM TREATMENT APPARATUS

Kazuyoshi Akiyama; Hiroaki Niino; Daisuke Tazawa; Nobufumi Tsuchida; 伸史 土田; 博明 新納; 大介 田澤; 和敬 秋山

Archive | 2000

SYSTEM AND METHOD FOR FORMING DEPOSIT FILM

Kazuyoshi Akiyama; Tatsuyuki Aoike; Kazuto Hosoi; Hitoshi Murayama; Takashi Otsuka; Toshiyasu Shirasago; Daisuke Tazawa; 崇志 大塚; 仁 村山; 大介 田澤; 寿康 白砂; 和敬 秋山; 一人 細井; 達行 青池

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Kazuyoshi Akiyama

Canon Inc.

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Hitoshi Murayama

Canon Inc.

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Hiroaki Niino

Canon Inc.

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Toshiyasu Shirasuna

Canon Inc.

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Yukihiro Abe

Canon Inc.

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Makoto Aoki

Canon Inc.

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Shinji Tsuchida

Canon Inc.

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Kazuto Hosoi

Canon Inc.

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Tatsuyuki Aoike

Canon Inc.

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Takashi Otsuka

Canon Inc.

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