Dale A. Harrison

Vacuum ultraviolet detector for gas chromatography

Analytical performance characteristics of a new vacuum ultraviolet (VUV) detector for gas chromatography (GC) are reported. GC-VUV was applied to hydrocarbons, fixed gases, polyaromatic hydrocarbons, fatty acids, pesticides, drugs, and estrogens. Applications were chosen to feature the sensitivity and universal detection capabilities of the VUV detector, especially for cases where mass spectrometry performance has been limited. Virtually all chemical species absorb and have unique gas phase absorption cross sections in the approximately 120-240 nm wavelength range monitored. Spectra are presented, along with the ability to use software for deconvolution of overlapping signals. Some comparisons with experimental synchrotron data and computed theoretical spectra show good agreement, although more work is needed on appropriate computational methods to match the simultaneous broadband electronic and vibronic excitation initiated by the deuterium lamp. Quantitative analysis is governed by Beer-Lambert Law relationships. Mass on-column detection limits reported for representatives of different classes of analytes ranged from 15 (benzene) to 246 pg (water). Linear range measured at peak absorption for benzene was 3-4 orders of magnitude. Importantly, where absorption cross sections are known for analytes, the VUV detector is capable of absolute determination (without calibration) of the number of molecules present in the flow cell in the absence of chemical interferences. This study sets the stage for application of GC-VUV technology across a wide breadth of research areas.

Gas chromatography-vacuum ultraviolet spectroscopy for multiclass pesticide identification.

A new vacuum ultraviolet detector for gas chromatography was recently developed and applied to multiclass pesticide identification. VUV detection features full spectral acquisition in a wavelength range of 115-240nm, where virtually all chemical species absorb. VUV absorption spectra of 37 pesticides across different classes were recorded. These pesticides display rich gas phase absorption features across various classes. Even for isomeric compounds, such as hexachlorocyclohexane (HCH) isomers, the VUV absorption spectra are unique and can be easily differentiated. Also demonstrated is the ability to use VUV data analysis software for deconvolution of co-eluting signals. As a universal detector, VUV provides both qualitative and quantitative information. It offers high specificity, sensitivity (pg on-column detection limits), and a fast data acquisition rate, making it a powerful tool for multiclass pesticide screening when combined with gas chromatography.

A Vacuum Ultraviolet Absorption Array Spectrometer as a Selective Detector for Comprehensive Two-Dimensional Gas Chromatography: Concept and First Results

Fast and selective detectors are very interesting for comprehensive two-dimensional gas chromatography (GC × GC). This is particularly true if the detector system can provide additional spectroscopic information on the compound structure and/or functionality. Other than mass spectrometry (MS), only optical spectroscopic detectors are able to provide selective spectral information. However, until present the application of optical spectroscopy technologies as universal detectors for GC × GC has been restricted mainly due to physical limitations such as insufficient acquisition speed or high detection limits. A recently developed simultaneous-detection spectrometer working in the vacuum ultraviolet (VUV) region of 125-240 nm overcomes these limitations and meets all the criteria of a universal detector for GC × GC. Peak shape and chromatographic resolution is preserved and unique spectral information, complementary to mass spectrometry data, is gained. The power of this detector is quickly recognized as it has the ability to discriminate between isomeric compounds or difficult to separate structurally related isobaric species; thus, it provides additional selectivity. A further promising feature of this detector is the data analysis concept of spectral filtering, which is accomplished by targeting special electronic transitions that allows for a fast screening of GC × GC chromatograms for designated compound classes.

Vacuum ultraviolet absorption spectroscopy in combination with comprehensive two-dimensional gas chromatography for the monitoring of volatile organic compounds in breath gas: A feasibility study

Vacuum ultraviolet (VUV) absorption spectroscopy was recently introduced as a new detection system for one, as well as comprehensive two-dimensional gas chromatography (GC×GC) and successfully applied to the analysis of various analytes in several matrices. In this study, its suitability for the analysis of breath metabolites was investigated and the impact of a finite volume of the absorption cell and makeup gas pressure was evaluated for volatile analytes in terms of sensitivity and chromatographic resolution. A commercial available VUV absorption spectrometer was coupled to GC×GC and applied to the analysis of highly polar volatile organic compounds (VOCs). Breath gas samples were acquired by needle trap micro extraction (NTME) during a glucose challenge and analysed by the applied technique. Regarding qualitative and quantitative information, the VGA-100 is compatible with common GC×GC detection systems like FID and even TOFMS. Average peak widths of 300ms and LODs in the lower ng range were achieved using GC×GC-VUV. Especially small oxygenated breath metabolites show intense and characteristic absorption patterns in the VUV region. Challenge responsive VOCs could be identified and monitored during a glucose challenge. The new VUV detection technology might especially be of benefit for applications in clinical research.

Impact of thin film metrology on the lithographic performance of 193-nm bottom antireflective coatings

The performance needs of a bottom antireflection coating (BARC) used in advanced optical lithography are extremely demanding, with reflectivities as low as 0.1% and even lower often required. BARC thickness and complex refractive index values (n = n + iκ) must be highly optimized, requiring accurate knowledge of the BARC, resist and substrate optical properties. In this paper, we have performed a theoretical analysis of the BARC optimization process with respect to the propagation of BARC n and κ measurement errors. For several realistic cases, specifications on the measurement accuracy of these optical parameters will be derived and the lithographic consequences of BARC metrology errors will be explored. Approaches to improving the measurement of BARC thickness and refractive index will be suggested.