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Daniel L. Brors

Applied Materials

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Publication

Featured researches published by Daniel L. Brors.

Archive | 2002

HIGH RATE DEPOSITION AT LOW PRESSURES IN A SMALL BATCH REACTOR

Robert C. Cook; Daniel L. Brors; James Mitchener; Gabe Ormonde

Archive | 1999

Vertical plasma enhanced process apparatus and method

Robert C. Cook; Daniel L. Brors

Archive | 1995

Method and apparatus for cold wall chemical vapor deposition

Daniel L. Brors; Robert C. Cook

Archive | 1997

Mini-batch process chamber

Daniel L. Brors; Robert C. Cook

Archive | 1999

Method and apparatus for improved chemical vapor deposition processes using tunable temperature controlled gas injectors

Robert C. Cook; Daniel L. Brors

Archive | 1999

High rate silicon deposition method at low pressures

Robert C. Cook; Daniel L. Brors

Archive | 2001

Thermal gradient enhanced CVD deposition at low pressure

Robert C. Cook; Daniel L. Brors

Archive | 1999

HIGH RATE SILICON NITRIDE DEPOSITION METHOD AT LOW PRESSURES

Robert C. Cook; Daniel L. Brors

Archive | 1999

High rate silicon dioxide deposition at low pressures

Robert C. Cook; Daniel L. Brors

Archive | 2003

High rate deposition in a batch reactor

Robert C. Cook; Daniel L. Brors; James Mitchener; Gabe Ormonde

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Robert C. Cook

Applied Materials

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