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Robert C. Cook

Applied Materials

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Publication

Featured researches published by Robert C. Cook.

Archive | 2002

HIGH RATE DEPOSITION AT LOW PRESSURES IN A SMALL BATCH REACTOR

Robert C. Cook; Daniel L. Brors; James Mitchener; Gabe Ormonde

Archive | 1999

Vertical plasma enhanced process apparatus and method

Robert C. Cook; Daniel L. Brors

Archive | 1995

Method and apparatus for cold wall chemical vapor deposition

Daniel L. Brors; Robert C. Cook

Archive | 1997

Mini-batch process chamber

Daniel L. Brors; Robert C. Cook

Archive | 1999

Method and apparatus for improved chemical vapor deposition processes using tunable temperature controlled gas injectors

Robert C. Cook; Daniel L. Brors

Archive | 2005

Substrate carrier for parallel wafer processing reactor

Robert C. Cook; Ronald Stevens; Peter Schwartz; Cesar Tejamo; Vebjorn Nilsen; Gabriel Ormonde; Ajit Paranjpe; Somnath Nag; Michael Patten

Archive | 1999

High rate silicon deposition method at low pressures

Robert C. Cook; Daniel L. Brors

Archive | 2007

BATCH PROCESSING CHAMBER WITH DIFFUSER PLATE AND INJECTOR ASSEMBLY

Joseph Yudovsky; Tai T. Ngo; Cesar Tejamo; Maitreyee Mahajani; Brendan McDougall; Yi-Chiau Huang; Robert C. Cook; Yeong K. Kim; Alexander Tam; Adam Brailove; Steve Ghanayem

Archive | 2005

Reaction chamber with opposing pockets for gas injection and exhaust

Joseph Yudovsky; Robert C. Cook; Yeong K. Kim; Alexander Tam; Maitreyee Mahajani; Adam Brailove; Steve Ghanayem

Archive | 2006

Batch deposition tool and compressed boat

Joseph Yudovsky; Robert C. Cook; Nir Merry

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Collaboration

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Daniel L. Brors

Applied Materials

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Joseph Yudovsky

Applied Materials

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Adam Brailove

Applied Materials

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Alexander Tam

Applied Materials

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Cesar Tejamo

Applied Materials

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Maitreyee Mahajani

Applied Materials

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Steve Ghanayem

Applied Materials

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Yeong K. Kim

Applied Materials

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Brendan McDougall

Applied Materials

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Nir Merry

Applied Materials

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